“…7,8 Such silica thin films are prepared by chemical vapor deposition, 2,5 ion-beam-assisted deposition, 4 flame hydrolysis deposition, 7 sol-gel method, 1,3,6,8 liquid-phase deposition, 9 cathodic electrolysis 10 , and electrophoretic deposition. 11 A solution route utilizing perhydropolysilazane (PHPS), an inorganic polymer composed of Si-N skeletons with Si-H terminal groups, has attracted much attention as a process for silica thin film preparation. The PHPS-based solution route was first addressed by Matsuo and Yamada, who deposited PHPS solutions on silicon wafers, followed by heat treatment at 450°C.…”