1998
DOI: 10.1007/s003390050703
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Test structure for SPM tip shape deconvolution

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Cited by 79 publications
(53 citation statements)
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“…With this model, the actual fibril radius r c can be calculated from α, β, θ, r t and w. The tip inclination, front, and back angles are generally provided by the manufacturer. However, the tip radius cannot be precisely controlled in the manufacturing process and frequently changes during the imaging process due to contamination [31]. In Reference [24], Kato et al assumed the tip radius to be 50 nm, and measured fibrils on flat surfaces.…”
Section: Appendix: Analysis and Simulation Of Tip Artifacts And Validmentioning
confidence: 99%
See 1 more Smart Citation
“…With this model, the actual fibril radius r c can be calculated from α, β, θ, r t and w. The tip inclination, front, and back angles are generally provided by the manufacturer. However, the tip radius cannot be precisely controlled in the manufacturing process and frequently changes during the imaging process due to contamination [31]. In Reference [24], Kato et al assumed the tip radius to be 50 nm, and measured fibrils on flat surfaces.…”
Section: Appendix: Analysis and Simulation Of Tip Artifacts And Validmentioning
confidence: 99%
“…Spherical samples have been modeled (e.g. [25,28,29,32]), several of which built directly on the work by Odin et al [26] and Garcia et al [30], as have AFM tips themselves [27,31]. Some of the relevant work is summarized in Table A1 and shown in Figure A1.…”
Section: Appendix: Analysis and Simulation Of Tip Artifacts And Validmentioning
confidence: 99%
“…Mankiewicz and Goh 32 use a hole as a negative function but the resulting tip radii have an uncertainty of š25 nm. Commercial, etched Si cone arrays 33 (silicon grating TGT 01, NT-MDT Co., Zelenagrad Research Institute of Physical Problems, Moscow) are excellent, with tip radii of <10 nm but, being very tall (700 nm), are not convenient for analysing the important final 20 nm of the AFM tips because the scan rates have to be very slow. We find that such etched arrays are very effective in a complementary use to the present sputtered InP material; the former for characterizing the overall tip shape from 10 to 100 nm from the end, and the latter for the final 20 nm.…”
Section: Atomic Force Microscopy Tip Characterizationmentioning
confidence: 99%
“…At the same time, tip characterizers have also been reported. Spherical structures such as colloidal gold [4], polystyrene or glass spheres [5,6], nanofabricated spheres [7], hole grid patterns [8], quantum dots [9], dot grid patterns [10], needle-shaped samples [11] and other nanostructures [12] have been demonstrated. However, it is difficult to evaluate the fine shape of an AFM tip, especially that of the sides.…”
Section: Introductionmentioning
confidence: 99%