Tensile and fatigue strength of ultrathin copper films

Zhang, G.P.; Sun, Ke; Zhang, B.; Gong, Jun; Sun, Chengqi; Wang, Z.G.

doi:10.1016/j.msea.2007.02.132

Cited by 70 publications

(23 citation statements)

References 15 publications

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“…High cycle fatigue (HCF) of thin films on polymer substrates has been studied in details in case of metallic films (especially Cu and Al) [58][59][60][61][62][63][64][65], whose damage state was primarily related to the grain structure. Fatigue studies of oxide films are much fewer and limited to conducting materials (especially Sn-doped In 2 O 3 , ITO) since these enable probing damage through electrical resistance measurement [66,67].…”

Section: High Cycle Fatigue Behavior Of Thin Oxide Films On Polymer Smentioning

confidence: 99%

Mechanical integrity of thin inorganic coatings on polymer substrates under quasi-static, thermal and fatigue loadings

et al. 2010

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The interplay between residual stress state, cohesive and adhesive properties of coatings on substrates is reviewed in this article. Attention is paid to thin inorganic coatings on polymers, characterized by a very high hygro-thermo-mechanical contrast between the brittle and stiff coating and the compliant and soft substrate. An approach to determine the intrinsic, thermal and hygroscopic contributions to the coating residual stress is detailed. The critical strain for coating failure, coating toughness and coating/substrate interface shear strength are derived from the analysis of progressive coating cracking under strain. Electrofragmentation and electro-fatigue tests in situ in a microscope are described. These methods enable reproducing the thermo-mechanical loads present during processing and service life, hence identifying and modeling the critical conditions for failure. Several case studies relevant to food and pharmaceutical packaging, flexible electronics and thin film photovoltaic devices are discussed to illustrate the benefits and limits of the present methods and models.

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Section: High Cycle Fatigue Behavior Of Thin Oxide Films On Polymer Smentioning

confidence: 99%

Mechanical integrity of thin inorganic coatings on polymer substrates under quasi-static, thermal and fatigue loadings

et al. 2010

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“…Tensile and fatigue tests of ultra-thin copper films were conducted using a microforce testing system by Zhang et al [86]. Fatigue strength as a function of film thickness was measured under the constant total strain range control at a frequency of 10 Hz.…”

Section: Size Dependency Of Tensile and Fatigue Strength In Ultra-thimentioning

confidence: 99%

“…However, little is known about fatigue damage and strength of metal films with nanometer-scale thickness and grain size. Zhang et al [86] present the evaluation of tensile yield strength and fatigue lifetime of ultrathin Cu films with a thickness of about 100 nm or less and nanometer-sized grains. Zhang et al [86] concluded that the yield strength of the ultra-thin Cu films further increases with decreasing film thickness down to several tens of nanometers.…”

Section: Size Dependency Of Tensile and Fatigue Strength In Ultra-thimentioning

confidence: 99%

“…Zhang et al [86] present the evaluation of tensile yield strength and fatigue lifetime of ultrathin Cu films with a thickness of about 100 nm or less and nanometer-sized grains. Zhang et al [86] concluded that the yield strength of the ultra-thin Cu films further increases with decreasing film thickness down to several tens of nanometers. A comparison of fatigue lifetimes between the ultra-thin films and those in the literature indicates that the fatigue resistance of the ultra-thin Cu films is [86] higher than those of the micrometer-thick films, but somewhat less than that of the sub-micrometer-thick films.…”

Section: Size Dependency Of Tensile and Fatigue Strength In Ultra-thimentioning

confidence: 99%

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Size Effect in Mechanical Properties of Nanostructured Coatings

Mahmood

2011

Nanocoatings

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“…The same set-up can also be used to measure the conventional S-N curves by using smooth specimens instead of notched specimens. In recent times, other fatigue test specimens and test systems have also been developed to study the fatigue behaviour of thin films [60][61][62] .…”

Section: Fatiguementioning

confidence: 99%

Experimental Techniques for the Measurement of Mechanical Properties of Materials Used in Microelectromechanical Systems

Kamat¹

2009

DSJ

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The knowledge of mechanical properties of materials used in microelectromechanical systems (MEMS) devices is critical not only in designing structures such as cantilevers and beams but also for ensuring their reliability during operation of these devices. It has been established that the mechanical properties are scaleand-process-dependent, and hence it is essential to measure the mechanical properties of these materials at the same length scale and using the same process as that used in their usage in MEMS devices. The various experimental techniques in vogue to measure the mechanical properties of these materials are briefly reviewed. The facilities established at the Defence Metallurgical Research Laboratory, Hyderabad, and their capabilities are also highlighted.

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Tensile and fatigue strength of ultrathin copper films

Cited by 70 publications

References 15 publications

Mechanical integrity of thin inorganic coatings on polymer substrates under quasi-static, thermal and fatigue loadings

Mechanical integrity of thin inorganic coatings on polymer substrates under quasi-static, thermal and fatigue loadings

Size Effect in Mechanical Properties of Nanostructured Coatings

Experimental Techniques for the Measurement of Mechanical Properties of Materials Used in Microelectromechanical Systems

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