Temperature optimization for MOCVD-based growth of ZnO thin films

Mishra, Prakash Chandra; Monroe, Brianna; Hussain, Babar; Ferguson, Ian T.

doi:10.1109/honet.2014.7029400

Cited by 6 publications

(2 citation statements)

References 27 publications

(40 reference statements)

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“…[13] DEZn begins to decompose at 357 °C but high crystal quality is achieved by increasing the growth temperature (450 °C and above) at pressure ≥ 30 Torr. [14][15][16][17] The structural analysis of grown ZnO by the XRD shows an increased crystallinity for the growth temperature above 400 .…”

Section: Methodsmentioning

confidence: 99%

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Optical and Structural Properties of Nickel Doped Zinc Oxide Grown by Metal Organic Chemical Vapor Deposition (MOCVD) at Different Reaction Chamber Conditions

Manzoor¹,

Saravade²,

Corda³

et al. 2020

ES Mater.Manuf.

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Metal organic chemical vapor deposition (MOCVD) growth of nickel-doped zinc oxide (Ni-doped ZnO) thin films on sapphire was investigated. The structural and optical properties were studied. The samples were grown at two substrate temperatures (i.e., 450 and 550 °C) and at three chamber pressures (22, 30 and 100 Torr). The Ni-doped ZnO samples showed the (002) hexagonal crystal structure with signs of secondary phases in X-ray diffraction (XRD) measurements. However, different XRD peak intensities were observed for these samples at different growth conditions with the same Ni flow rate injection to the reaction chamber. The samples grown at different growth conditions had different optical absorption spectra. Results prove that the growth at a low pressure and temperatures close to the decomposition temperature of the precursors resulted in an optimum dopant incorporation, sharp absorption band edges, and good crystalline quality.

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Section: Methodsmentioning

confidence: 99%

“…℃ [17] On the other side, Cp 2 Ni decomposition and NiO formation with (111) orientation occur at temperatures above 275 .…”

Section: Methodsmentioning

confidence: 99%

Optical and Structural Properties of Nickel Doped Zinc Oxide Grown by Metal Organic Chemical Vapor Deposition (MOCVD) at Different Reaction Chamber Conditions

Manzoor¹,

Saravade²,

Corda³

et al. 2020

ES Mater.Manuf.

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Thickness uniformity and optical/structural evaluation of RF sputtered ZnO thin films for solar cell and other device applications

et al. 2017

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Specifications of ZnO growth for heterostructure solar cell and PC1D based simulations

Hussain

Ebong

2015

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This data article is related to our recently published article (Hussain et al., in press [1]) where we have proposed a new solar cell model based on n-ZnO as front layer and p-Si as rear region. The ZnO layer will act as an active n-layer as well as antireflection (AR) coating saving considerable processing cost. There are several reports presenting use of ZnO as window/antireflection coating in solar cells (Mansoor et al., 2015; Haq et al., 2014; Hussain et al., 2014; Matsui et al., 2014; Ding et al., 2014 [2], [3], [4], [5], [6]) but, here, we provide data specifically related to simultaneous use of ZnO as n-layer and AR coating. Apart from the information we already published, we provide additional data related to growth of ZnO (with and without Ga incorporation) layers using MOCVD. The data related to PC1D based simulation of internal and external quantum efficiencies with and without antireflection effects of ZnO as well as the effects of doping level in p-Si on current–voltage characteristics have been provided.

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Temperature optimization for MOCVD-based growth of ZnO thin films

Cited by 6 publications

References 27 publications

Optical and Structural Properties of Nickel Doped Zinc Oxide Grown by Metal Organic Chemical Vapor Deposition (MOCVD) at Different Reaction Chamber Conditions

Optical and Structural Properties of Nickel Doped Zinc Oxide Grown by Metal Organic Chemical Vapor Deposition (MOCVD) at Different Reaction Chamber Conditions

Thickness uniformity and optical/structural evaluation of RF sputtered ZnO thin films for solar cell and other device applications

Specifications of ZnO growth for heterostructure solar cell and PC1D based simulations

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