Temperature-dependent electrical conductivity in thermally carbonized porous silicon

Salonen, Jarno; Björkqvist, M.; Paski, J.

doi:10.1016/j.sna.2004.05.005

Cited by 23 publications

(15 citation statements)

References 27 publications

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“…At the periphery of the pillar, the oxygen content increases, to encompass a 6.4 µm diameter, suggesting the region of the pit may also contain oxidized PS which formed after HF immersion of the laser written features once exposed to air. The darker central region on the SEM is suggestive of a more conductive material, consistent with thermally carbonized PS . Silicon content appeared lowest in the central 3 µm region and continues to decrease out to 6 µm.…”

Section: A Comparison Of Laser Writing Approaches Involving Porous Mamentioning

confidence: 74%

Selective Oxidation and Carbonization by Laser Writing into Porous Silicon

Keating

Sun

2018

Adv Materials Technologies

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The selective formation of either oxidized or carbonized features into 2.5 µm thick porous silicon (PS) films using laser writing at a wavelength of 405 nm is demonstrated. Oxidized features are formed in air while carbonized features are achieved during the flow of propane at 600 sccm. Voids which have been previously associated with the use of propane are not observed, largely due to the rapid heating and high flow rates achieved in the experiment. Carbonized regions with feature widths down to 1.8 µm are achieved and chemical resistance to both hydrofluoric acid and potassium hydroxide is demonstrated. Once carbonized regions are formed, the surrounding areas can be overwritten in air to convert the surrounding regions into oxidized PS allowing films to be created with as‐fabricated, oxidized and carbonized regions. Energy dispersive X‐ray and Raman analysis confirms the presence of carbon within the written structures. At high optical powers, cracking around the carbonized features is observed which is attributed to a contraction of the film. Such cracking is not observed during selective oxidation of features. This work significantly enhances the ability to engineer and pattern the composition of PS films enabling selective control of the material's properties and functionality.

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Section: A Comparison Of Laser Writing Approaches Involving Porous Mamentioning

confidence: 74%

Selective Oxidation and Carbonization by Laser Writing into Porous Silicon

Keating

Sun

2018

Adv Materials Technologies

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“…The resistance of TCPSi can be 10 −5 times lower than in the as‐anodized sample of the same thickness . When compared with oxidized PSi, the difference is even more drastic.…”

Section: Properties Of Thermally Carbonized Porous Siliconmentioning

confidence: 92%

Thermally Carbonized Porous Silicon and Its Recent Applications

Salonen

Mäkilä

2018

Advanced Materials

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Recent progress in research on thermally carbonized porous silicon (TCPSi) and its applications is reported. Despite a slow start, thermal carbonization has now started to gain interest mainly due to new emerging areas for applications. These new areas, such as optical sensing, drug delivery, and energy storage, require stable surface chemistry and physical properties. TCPSi is known to have all of these desired properties. Herein, the above-listed properties of TCPSi are summarized, and the carbonization processes, functionalization, and characterization of TCPSi are reviewed. Moreover, some of the emerging fields of TCPSi applications are discussed and recent advances in the fields are introduced.

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“…[33][34][35] In addition, the surface chemistry of PSi can be modified easily. [36][37][38] Among the different surface chemistries, thermally carbonized PSi displays a highly increased electrical conductivity, 39,40 which enables, along with the possibility of fabricating nano-and microparticles, the preparation of PSi-based solution-processable inks needed for making printable devices. In the current study, the feasibility of PSi particles for printed humidity sensor production is explored.…”

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confidence: 99%

“…The treatment resulted in a stable, but hydrophobic thermally hydrocarbonized (THC) PSi surface, [42][43][44] with an electrical conductivity several magnitudes larger than that of as-anodized PSi surface. 39 In order to turn the surface hydrophilic, the THCPSi films were functionalized with undecylenic acid by immersing the films in an undecylenic acid solution for 12 h at 110 C. This resulted in partial functionalization of the hydrocarbonized PSi surface. 38,45 The undecylenic acid functionalized thermally hydrocarbonized (UnTHC) films were copiously rinsed with ethanol and dichloromethane in order to remove excess acid.…”

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confidence: 99%

Porous silicon micro- and nanoparticles for printed humidity sensors

Jalkanen

Mäkilä

Määttänen

et al. 2012

Applied Physics Letters

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Accurate measurements of water vapor transmission through high-performance barrier layers Rev. Sci. Instrum. 83, 075118 (2012) Quantitative calcium resistivity based method for accurate and scalable water vapor transmission rate measurement Rev. Sci. Instrum. 82, 085101 (2011) Humidity response properties of a potentiometric sensor using LaF3 thin film as the solid electrolyte Rev. Sci. Instrum. 82, 083901 (2011) New Products Rev. Sci. Instrum. 82, 029501 (2011) Biologically inspired humidity sensor based on three-dimensional photonic crystals

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Temperature-dependent electrical conductivity in thermally carbonized porous silicon

Cited by 23 publications

References 27 publications

Selective Oxidation and Carbonization by Laser Writing into Porous Silicon

Selective Oxidation and Carbonization by Laser Writing into Porous Silicon

Thermally Carbonized Porous Silicon and Its Recent Applications

Porous silicon micro- and nanoparticles for printed humidity sensors

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