2018
DOI: 10.1002/adma.201703819
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Thermally Carbonized Porous Silicon and Its Recent Applications

Abstract: Recent progress in research on thermally carbonized porous silicon (TCPSi) and its applications is reported. Despite a slow start, thermal carbonization has now started to gain interest mainly due to new emerging areas for applications. These new areas, such as optical sensing, drug delivery, and energy storage, require stable surface chemistry and physical properties. TCPSi is known to have all of these desired properties. Herein, the above-listed properties of TCPSi are summarized, and the carbonization proc… Show more

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Cited by 56 publications
(42 citation statements)
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“…However, differences in their respective water contact angles provide evidence of the changing surface chemistry. THCpSi substrates presented a contact angle of 122° ± 4° while TCpSi showed a significantly lower contact angle of 31° ± 4°, which are in agreement with the hydrophobic and hydrophilic behavior of THCpSi and TCpSi, respectively, as previously reported by Salonen et al…”
Section: Resultssupporting
confidence: 91%
“…However, differences in their respective water contact angles provide evidence of the changing surface chemistry. THCpSi substrates presented a contact angle of 122° ± 4° while TCpSi showed a significantly lower contact angle of 31° ± 4°, which are in agreement with the hydrophobic and hydrophilic behavior of THCpSi and TCpSi, respectively, as previously reported by Salonen et al…”
Section: Resultssupporting
confidence: 91%
“…There has been intense interest in the use of carbonization to passivate PS films. Carbonization can be achieved through a number of wet and gas‐based processes, with the use of acetylene at 600 °C being the most widely used approach for carbonization of an entire film. The carbonization process ensures the pores remain open and clear, maintaining the large surface after thermal treatment.…”
Section: A Comparison Of Laser Writing Approaches Involving Porous Mamentioning
confidence: 99%
“…Subsequently, the films were immersed in AZ326 developer containing in 1% KOH, typically used during microelectronics processing of positive photoresists. The ability to survive such chemical immersions is an important test of the robustness of the passivation . Immersion in KOH stripped the unpassivated PS from the surface leaving bare silicon and laser written features.…”
Section: A Comparison Of Laser Writing Approaches Involving Porous Mamentioning
confidence: 99%
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“…Chen and Du (2014) studied a lithium lanthanum titanate as a promising solid electrolite-not experimentally but by molecular dynamics and atomistic computer simulations. Salonen and Mäkilä (2018) note applications of porous silicon in areas as diverse as luminescence, drug delivery and battery technology. Braun et al (2018) have developed a method of fabrication of entropy-stabilized ceramics with low thermal conductivity while mechanically strong at the same time.…”
Section: Introduction and Scopementioning
confidence: 99%