Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With ±16 ppm Temperature Stability Over Industrial Temperature Ranges

Han, Jinzhao; Xiao, Yuhao; Chen, Wen; Jia, Wenhan; Zhu, Kewen; Wu, Guoqiang

doi:10.1109/jmems.2022.3189202

Cited by 14 publications

(6 citation statements)

References 16 publications

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“…The experimental result shows that correctly positioned stretched mode resonators on highly n-doped silicon substrates have a TCF zero point, and that the total frequency variation of highly phosphorus-doped resonators aligned to <100> crystal orientations can reach less than 245 ppm over the −40 • C to 85 • C range. A 10 MHz highly doped capacitive MEMS resonator was reported by [101], and the frequency turnover point was changed by adjusting the crystal orientation. Results show less than ±16 ppm frequency jitter from −40 • C to 85 • C when the resonator is positioned 22.5 • in the <110> direction.…”

Section: Passive Compensationmentioning

confidence: 99%

Concepts and Key Technologies of Microelectromechanical Systems Resonators

Feng

Yuan

et al. 2022

Micromachines

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In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stability of MEMS resonators, are summarized. Finally, the development status, existing challenges and future trend of MEMS resonators are summarized. As a typical research field of vibration engineering, MEMS resonators have shown great potential to replace quartz resonators in timing, frequency, and resonant sensor applications. However, because of the limitations of practical applications, there are still many aspects of the MEMS resonators that could be improved. This paper aims to provide scientific and technical support for the improvement of MEMS resonators in timing, frequency, and resonant sensor applications.

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Section: Passive Compensationmentioning

confidence: 99%

Concepts and Key Technologies of Microelectromechanical Systems Resonators

Feng

Yuan

et al. 2022

Micromachines

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“…Clark et al improved oscillator noise performance by using a material passive temperature compensation mechanism with a silicon dioxide buried layer [15]. Han et al used a combined approach of degenerated doping and crystal orientation adjustment to enhance the temperature stability of resonators [16]. Although the micro-oven compensation method is precise and stable, it requires high power consumption, while passive compensation methods lead to complex machining process.…”

Section: Introductionmentioning

confidence: 99%

Adaptive frequency-stabilization of MEMS oscillators using mode coupling

Huan,

Dai,

Wang

et al. 2024

J. Micromech. Microeng.

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MEMS (Microelectromechanical Systems) oscillators with high frequency stability hold significant potential for a myriad of applications across diverse fields. This letter delves into an adaptive frequency stabilization system designed to significantly improve the performance of MEMS oscillators. Our approach leverages the concept of mode coupling to dynamically adjust the oscillator’s frequency based on phase control, ensuring optimal stability under varying operating conditions. The MEMS oscillator comprises a nonlinear low-frequency resonator and a linear high-frequency resonator. Through mode coupling and phase control, the nonlinearresonator is harnessed to regulate the oscillation frequency of the linear resonator. Experimental results prove that by applying the proposed approach, the frequency stability of the MEMS oscillator is enhanced by nearly 700 times for long-term stability at 1000s. Additionally, in the scenario with varying temperature, the system also effectively improves the frequency stability by over 1000 times at 802s.

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“…Its sensitivity to both randomness and periodicity in signals makes it well suited for analyzing complex, nonlinear systems. In recent years, many scholars have integrated such sequence entropy algorithms with other compensation methods to analyze nonstationary signals [24][25][26]. This reflects the growing trend of leveraging their capabilities in signal processing applications.…”

Section: Introductionmentioning

confidence: 99%

A Temperature Compensation Approach for Micro-Electro-Mechanical Systems Accelerometer Based on Gated Recurrent Unit–Attention and Robust Local Mean Decomposition–Sample Entropy–Time-Frequency Peak Filtering

Cui,

Xu,

Huang

et al. 2024

Micromachines

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MEMS accelerometers are significantly impacted by temperature and noise, leading to a considerable compromise in their accuracy. In response to this challenge, we propose a parallel denoising and temperature compensation fusion algorithm for MEMS accelerometers based on RLMD-SE-TFPF and GRU-attention. Firstly, we utilize robust local mean decomposition (RLMD) to decompose the output signal of the accelerometer into a series of product function (PF) signals and a residual signal. Secondly, we employ sample entropy (SE) to classify the decomposed signals, categorizing them into noise segments, mixed segments, and temperature drift segments. Next, we utilize the time-frequency peak filtering (TFPF) algorithm with varying window lengths to separately denoise the noise and mixed signal segments, enabling subsequent signal reconstruction and training. Considering the strong inertia of the temperature signal, we innovatively introduce the accelerometer’s output time series as the model input when training the temperature compensation model. We incorporate gated recurrent unit (GRU) and attention modules, proposing a novel GRU-MLP-attention model (GMAN) architecture. Simulation experiments demonstrate the effectiveness of our proposed fusion algorithm. After processing the accelerometer output signal through the RLMD-SE-TFPF denoising algorithm and the GMAN temperature drift compensation model, the acceleration random walk is reduced by 96.11%, with values of 0.23032 g/h/Hz for the original accelerometer output signal and 0.00895695 g/h/Hz for the processed signal.

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Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With ±16 ppm Temperature Stability Over Industrial Temperature Ranges

Cited by 14 publications

References 16 publications

Concepts and Key Technologies of Microelectromechanical Systems Resonators

Concepts and Key Technologies of Microelectromechanical Systems Resonators

Adaptive frequency-stabilization of MEMS oscillators using mode coupling

A Temperature Compensation Approach for Micro-Electro-Mechanical Systems Accelerometer Based on Gated Recurrent Unit–Attention and Robust Local Mean Decomposition–Sample Entropy–Time-Frequency Peak Filtering

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