Temperature Characteristics of Resonance Frequency for Double-Layered Thickness-Shear Resonator

Ohashi, Yuji; Owada, Yusuke; Yokota, Yuui; Omote, Masaya; Kurosawa, Shunsuke; Kamada, Kei; Sato, Hisako; Toyoda, Satoshi; Yamaji, Akihiro; Yoshino, Masao; Hanada, Takashi; Yoshikawa, Akira

doi:10.1109/tuffc.2021.3121782

Cited by 3 publications

(6 citation statements)

References 35 publications

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“…In previous work, 37) it was found that the equation considering the electric flux density ratio r D of each layer should be used for more accurate prediction as follows:…”

Section: Calculation Modelmentioning

confidence: 99%

“…Therefore, we proposed a "double layer resonator (DLR)" using a Ca 3 TaGa 3 Si 2 O 14 (CTGS) single crystal substrate and confirmed its temperature compensation effect. 36,37) We also developed a calculation model for predicting temperature characteristics using the electric flux density ratio. 37) However, the calculation results of this model were significantly different from the measured values of the temperature characteristics of the α-quartz double-layered resonator (QZ-DLR).…”

Section: Introductionmentioning

confidence: 99%

“…36,37) We also developed a calculation model for predicting temperature characteristics using the electric flux density ratio. 37) However, the calculation results of this model were significantly different from the measured values of the temperature characteristics of the α-quartz double-layered resonator (QZ-DLR). 38) Based on this result, in the previous work, we proposed a calculation model using the total strain ratio that takes into account the influence of reflected waves at the bonding boundary of the QZ-DLR.…”

Section: Introductionmentioning

confidence: 99%

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Development of calculation model for designing temperature characteristics of double-layered thickness-shear resonator

Ohashi,

Noguchi,

Yokota

et al. 2024

Jpn. J. Appl. Phys.

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A calculation model for predicting the temperature characteristics of the double-layered resonator (DRL) was developed by using the total strain ratio including the influence of the waves reflected at the bonding boundary. The validity of the model proposed was examined from the comparison between the measured and calculated results for a DRL specimen consisting of 129.55°Y- and 0°Y-quartz substrates. The calculation results of the model proposed demonstrated that it is possible to predict the trends of changes in experimental values of temperature characteristics not only in the 1st-order mode but also in the higher-order modes. In addition, the changes in the particle displacement distribution and temperature characteristics of the DLR obtained by the model proposed were also in good agreement with the results of finite element method (FEM) analysis. The proposed model is expected to greatly contribute to the design of DLRs with high excitation efficiency and excellent temperature characteristics.

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“…In previous work, 37) it was found that the equation considering the electric flux density ratio r D of each layer should be used for more accurate prediction as follows:…”

Section: Calculation Modelmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Development of calculation model for designing temperature characteristics of double-layered thickness-shear resonator

Ohashi,

Noguchi,

Yokota

et al. 2024

Jpn. J. Appl. Phys.

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“…where # df 1 and # df 2 are the temperature characteristics of the resonance frequency of the #1 layer and the #2 layer, respectively, and x is the thickness ratio between two substrates. In previous work, 26) however, it was found that the equation considering the electric flux density ratio of each layer should be used for more accurate prediction as follows:…”

Section: Specimen Preparationmentioning

confidence: 99%

“…[18][19][20][21][22][23][24] In previous work, we confirmed the compensation of the temperature characteristics by directly bonding substrates with different cut angles with positive and negative characteristics, and also developed a prediction equation for that by considering the electric flux density ratio. 25,26) In general, when the acoustic impedance of the two substrates are different, the waves reflected at the bonded boundary are inevitably generated. However, the influence of the reflected waves could not be observed for the case of CTGS due to the small anisotropy of the acoustic impedance.…”

Section: Introductionmentioning

confidence: 99%

Influence of reflected waves at the bonded boundary in double-layered thickness-shear resonator using α-quartz

Noguchi

Ohashi

Omote³

et al. 2022

Jpn. J. Appl. Phys.

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The influence of the reflected waves at the bonding boundary on the resonance waveform and temperature characteristics was investigated using α-quartz (QZ). The double-layered resonator specimen was fabricated using 129.55°Y- and 0°Y-cut QZ substrates with the thickness ratio x=0.520. The temperature characteristic at the range from 100°C to 300°C was deviated from the calculated values estimated by the equations considering thickness and electric flux density ratio proposed in the previous work, and the resonant waveform of the specimen was deteriorated as compared with that of single-layer resonators. In order to clarify these phenomena, the phase matching conditions and total amplitude in the specimen were examined. As a result, it was clarified that increase of the amplitude in the layer with lower acoustic impedance was affected to the temperature characteristic, and acoustic losses due to reflection / transmission at the bonding boundary was affected to the total amplitude of resonance.

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Temperature characteristics of a thickness shear mode quartz crystal resonator bonded to a support substrate

Satani

Yasuda

Sohgawa

et al. 2022

Applied Physics Letters

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Thickness shear mode (TSM) resonators consisting of metal films and quartz plates are widely used for sensor applications such as film thickness monitoring, force sensors, and odor sensors. However, the current sensor geometry prevents further improvements in its sensitivity and stability. Thinning the plate is necessary for high sensitivity, and advanced fabrication technologies are required for their commercialization. The solution is to use a support substrate to increase the mechanical strength, which can guide the transmittance of the electric field. Herein, we report a TSM resonator bonded to a support substrate. An AT-cut quartz resonator with a floating electrode on the top side was bonded to the support substrate. Two excitation electrodes were placed under the substrate. The support substrates evaluated in this study included borosilicate glass, Z-cut quartz crystals, and AT-cut quartz crystal plates. The quartz crystal resonator (QCR) bonded to the AT-cut quartz crystal plate and positioned at 90° to the crystallographic x-axis shows an excellent temperature coefficient of frequency of −60 ± 14 ppb/°C for a temperature range 11–40 °C. The proposed method reduces temperature sensitivity to 1/4 or less compared to that without a substrate. Furthermore, the resonator could be used as a quartz crystal microbalance. The proposed method may inspire further high-frequency QCR-based biochemical chips or various sensor applications with TSM resonators.

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Temperature Characteristics of Resonance Frequency for Double-Layered Thickness-Shear Resonator

Cited by 3 publications

References 35 publications

Development of calculation model for designing temperature characteristics of double-layered thickness-shear resonator

Development of calculation model for designing temperature characteristics of double-layered thickness-shear resonator

Influence of reflected waves at the bonded boundary in double-layered thickness-shear resonator using α-quartz

Temperature characteristics of a thickness shear mode quartz crystal resonator bonded to a support substrate

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