2009
DOI: 10.1016/j.ultramic.2009.06.011
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TEM sample preparation by FIB for carbon nanotube interconnects

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Cited by 26 publications
(19 citation statements)
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“…5(a2), the CNT wall was magnified 50 times and lattice fringe is in parallel with the wire axis. The lattice spacing was measured to be 0.344 nm, which is in good agreement with the lattice spacing of CNT reported by Ke et al [33]. Fig.…”
Section: Resultssupporting
confidence: 89%
“…5(a2), the CNT wall was magnified 50 times and lattice fringe is in parallel with the wire axis. The lattice spacing was measured to be 0.344 nm, which is in good agreement with the lattice spacing of CNT reported by Ke et al [33]. Fig.…”
Section: Resultssupporting
confidence: 89%
“…S6, Electronic Supplementary Material). The SEM images of the artefacts caused by insufficient ion milling of the CNTs looks similar to the SEM images by Ke et al showing CNTs protruding from a surface [30]. To investigate whether it was in fact protruding CNTs, the sample was rotated to image the milled surface (almost) from the point of view of the ion beam (Fig.…”
Section: Resultssupporting
confidence: 65%
“…Different electrontransparent lamellas were prepared by following a similar procedure described elsewhere. 44 In-plane conductivity of the samples was carried out by the four-probe Van der Pauw method by using silver-gold ink and Au wires for the electrical connections. The measurements were carried out in synthetic air between room temperature and 600 °C, during the heating and cooling cycles to test the reproducibility of the data.…”
Section: Thin Film Characterizationmentioning
confidence: 99%