Technology of the fabrication of Mo-based diode and triode structures with nanoscale vacuum gap

Gryazneva, Tatiana A.; Djuzhev, N. A.; Demin, G. D.; Filippov, Nikolay A.; Evsikov, Ilya D.; Makhiboroda, M. A.

doi:10.1109/ivnc52431.2021.9600800

2021 34th International Vacuum Nanoelectronics Conference (IVNC) 2021

DOI: 10.1109/ivnc52431.2021.9600800

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Technology of the fabrication of Mo-based diode and triode structures with nanoscale vacuum gap

Tatiana A. Gryazneva

N. A. Djuzhev

G. D. Demin

et al.

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Technology of the fabrication of Mo-based diode and triode structures with nanoscale vacuum gap

Cited by 1 publication

References 7 publications

Highly Selective Plasma Etching Technique for Molybdenum

Highly Selective Plasma Etching Technique for Molybdenum

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