Technology of ion exchange in glass and its application in waveguide planar sensors

Opilski, A.; Rogoziński, R.; Błahut, M.; Karasiński, Paweł; Gut, K.; Opilski, Z.

doi:10.1117/1.601181

Cited by 21 publications

(15 citation statements)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The increase in homo− geneous and surface sensitivities, and hence further de− crease in detection limits can be obtained by raising the con− trast of refractive index in the sensor structure. The gradient waveguide can be produced in the ion exchange in the sub− strate of lower refractive index, with obligatory content of sodium as a modifier (Corning 7740, n b = 1.47) [33][34][35]. A uniform waveguide film can be made from the material of higher refractive index such as tantalum pentoxide Ta 2 O 5 or titania TiO 2 .…”

Section: Resultsmentioning

confidence: 99%

“…Gradient waveguides were produced in the ion exchange process [33][34][35][36], and uniform films using the sol−gel method [37,38]. For composite waveguide structures, the dependence of effective indexes on the thickness d of the uniform film was determined.…”

Section: Methodsmentioning

confidence: 99%

“…Basing on the uncertainty of the approximation parameters d = d(v), it was found that the dispersion involving the thickness of uniform films produced in one technological process is lower than 2% and the dispersion of refractive indexes does not exceed 0.7%. In the processes of ion exchange K + −Na + , we can produce maximum changes of a refractive index at the level of~0.01, and the obtained refractive profiles can be controlled with high precision [33][34][35].…”

Section: Technologymentioning

confidence: 99%

See 2 more Smart Citations

Optical uniform/gradient waveguide sensor structure - characterization

Karasiński

2011

Opto-Electronics Review

View full text Add to dashboard Cite

The paper presents the characterization of a composite uniform/gradient waveguide sensor structure. The results of theoretical analysis and experimental studies have been presented. The influence of sensor structure parameters on homogenous sensitivity and on surface sensitivity has been analyzed. Gradient layers for composite sensor structures were produced using the ion-exchange method, and the uniform layers, using the sol-gel method. In the experimental studies, involving the produced sensor structures, a prism coupler and a grating coupler were applied. Excellent agreement between the results of theoretical analysis and experimental studies has been achieved.

show abstract

Section: Resultsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Technologymentioning

confidence: 99%

See 1 more Smart Citation

Optical uniform/gradient waveguide sensor structure - characterization

Karasiński

2011

Opto-Electronics Review

View full text Add to dashboard Cite

show abstract

“…The systems of integrated optics can be produced with the application of: ion exchange in glass [1,2], chemical vapor deposition (CVD) [3] or sol-gel technology [4][5][6][7][8][9][10][11]. The sol-gel technology has a big advantage as compared to others since it does not require expensive technological equipment and it can provide various dielectric materials of controlled structures for optoelectronics.…”

Section: Introductionmentioning

confidence: 99%

Single-Mode Rib Waveguides Fabricated by Means of Sol-Gel Method

2010

View full text Add to dashboard Cite

Rib waveguides were fabricated with the use of selective, wet chemical etching of two-component waveguide films SiO2:TiO2 which were obtained using sol-gel method. Photoresist was applied as a mask in the process. The etching of the films SiO2:TiO2 was carried out in water solution of ammonia fluoride. The paper presents the results of theoretical analysis as well as the power distributions in the fabricated strip waveguides.

show abstract

“…The integrated optics is based on waveguide films which are produced by various techniques, such as: ion exchange in glass [1], [2], methods of chemical vapour deposition (PECVD, LPCVD) [3] and the sol-gel method [4]- [7]. In chemical vapour deposition methods and in the sol-gel method, uniform waveguide films are produced whereof refractive index can be controlled within a wide range.…”

mentioning

confidence: 99%

Low loss silica-titania waveguide films

KarasiĹ„ski¹,

Jaglarz²,

Mazur³

2010

Photon. Lett. Poland

View full text Add to dashboard Cite

Abstract-The paper presents research results on two-component waveguide films SiO 2 :TiO 2 produced in sol-gel technology. The waveguide films were deposited on soda-lime glass substrates using the dip-coating method. For the produced waveguide films, the dispersion characteristics of the refractive index and of the extinction coefficient were determined. The AFM method was used to investigate the typology of waveguide film surfaces. The attenuation of waveguide films was determined using the streak method. [7]. In chemical vapour deposition methods and in the sol-gel method, uniform waveguide films are produced whereof refractive index can be controlled within a wide range. Such methods can be applied to produce waveguide structures having high-contrast refractive indexes and low attenuation. The paper presents the research results involving two-component waveguide films SiO 2 :TiO 2 produced in sol-gel technology. The waveguide films were deposited on soda-lime glass substrates using the dip-coating method. The properties of the waveguide films have been presented with a particular emphasis placed on their attenuation. As the precursors of silica (SiO 2 ) and titania (TiO 2 ) we applied respectively tetraetoxysilane Si(OC 2 H 5 ) 4 (TEOS) and tetraetoxytitanate (TET). Ethanol (C 2 H 5 OH) was used as a homogenizing agent, and hydrochloric acid HCl as a catalyst. For the produced sols, the molar ratio TEOS:TET was 1. After the deposition of sols on glass substrates, the structures were heated at 500°C for 60min. The thickness of the produced waveguide films was controlled through a substrate withdrawal speed.The dispersion characteristics of the films SiO 2 :TiO 2 were determined with the application of the spectral ellipsometer Woollam M2000 (λ=200±1700nm). The dispersion characteristics of the refractive index n and of the extinction coefficient ĸ are presented in Fig.1. These relations, and in particular the dispersion characteristic of the refractive index is indispensable in the designing process of planar elements or systems produced with the application of the presented waveguide films. Fig.2 presents the topography image of a waveguide film surface obtained with the use of an atomic force microscope AFM. The surface root mean square roughness determined for the whole area 1×1µm 2 was σ rms =0.225nm. Roughness is one of the basic parameters characterizing surface quality. Attenuation measurements were carried out using the streak method. The setup of such a measuring system is presented in Fig.3. Planar waveguides SW were excited using a prism coupler PC. A laser diode LD (λ=677nm)

show abstract

Technology of ion exchange in glass and its application in waveguide planar sensors

Cited by 21 publications

References 6 publications

Optical uniform/gradient waveguide sensor structure - characterization

Optical uniform/gradient waveguide sensor structure - characterization

Single-Mode Rib Waveguides Fabricated by Means of Sol-Gel Method

Low loss silica-titania waveguide films

Contact Info

Product

Resources

About