Technology aspects of a CMOS neuro-sensor: back end process and packaging

Hofmann, Franz; Eversmann, B.; Jenkner, M.; Frey, Alexander; Merz, M.; Birkenmaier, T.; Fromherz, Peter; Schreiter, Matthias; Gabl, R.; Plehnert, K.; Steinhauser, M.; Eckstein, G.; Thewes, R.

doi:10.1109/essderc.2003.1256837

Cited by 12 publications

(8 citation statements)

References 5 publications

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“…In terms of biocompatibility, graphene exhibit a similar performance than diamond [22] and AlGaN/GaN, [23] whereas silicon devices require additional encapsulation layers to improve their stability. [25] Some materials, such as carbon nanotubes, also allow the fabrication of sensitive solution-gated transistors, [26] but their biocompatibility is still controversial. [27] Manufacturing flexible devices is not possible with singlecrystalline diamond or AlGaN/GaN heterostructures and strongly deteriorates the electronic properties for silicon.…”

Section: Introductionmentioning

confidence: 99%

Graphene Transistors for Bioelectronics

2013

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Section: Introductionmentioning

confidence: 99%

Graphene Transistors for Bioelectronics

2013

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“…The process flow of the extended CMOS process is schematically sketched in Fig. 4 [15], [16]. We start with a two-metallayer n-well epi CMOS process optimized for analog applications with minimum gate length m, gate oxide thickness nm, supply voltage V, LATID-n-MOS and LDD-pMOS devices, poly-poly capacitors, and different types of polysilicon resistors.…”

Section: Extended Cmos Processmentioning

confidence: 99%

A 128 × 128 CMOS bio-sensor array for extracellular recording of neural activity

Eversmann¹,

Jenkner²,

Paulus³

et al.

2003 IEEE International Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC.

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“…This can become relevant for certain spectroscopic experiments, where exposing the Ge-based SLSPP waveguides to the analyte might specifically benefit from using TiO 2 as a coating [63]. Its additional properties as a robust and bio-compatible coating material [64] and seed for activated surfaces [65], can in such a case counter-balance the expected higher overall losses from a thicker coating.…”

Section: Submersion Experiments In H 2 Omentioning

confidence: 99%

Octave-spanning low-loss mid-IR waveguides based on semiconductor-loaded plasmonics

David

Dabrowska²,

Sistani

et al. 2021

Opt. Express

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Plasmonic waveguides are crucial building blocks for integrated on-chip mid-infrared (mid-IR) sensors, which have recently attracted great interest as a sensing platform to target enhanced molecular sensing. However, while hosting a wide range of applications from spectroscopy to telecommunication, the mid-IR lacks suitable broadband solutions that provide monolithic integration with III-V materials. This work reports a novel concept based on hybrid semiconductor-metal surface plasmon polariton waveguides, which result in experimentally demonstrated low loss and broadband devices. Composed of a thin germanium slab on top of a gold layer, the waveguiding properties can be directly controlled by changing the geometrical parameters. The measured losses of our devices are as low as 6.73 dB/mm at 9.12 µm and remain <15 dB/mm in the mid-IR range of 5.6–11.2 µm. The octave-spanning capability of the waveguides makes them ideal candidates for combination with broadband mid-IR quantum cascade laser frequency combs and integrated spectroscopic sensors.

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Technology aspects of a CMOS neuro-sensor: back end process and packaging

Cited by 12 publications

References 5 publications

Graphene Transistors for Bioelectronics

Graphene Transistors for Bioelectronics

A 128 × 128 CMOS bio-sensor array for extracellular recording of neural activity

Octave-spanning low-loss mid-IR waveguides based on semiconductor-loaded plasmonics

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