Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2019 2019
DOI: 10.1117/12.2536746
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Technology and characterization of ISFET structures with graphene membrane

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(1 citation statement)
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“…DLC (diamond-like carbon), AlN, Al 2 O 3 ) [1,7,8] or 2D materials (e.g. graphene) [9] can be applied instead of commonly used stacked gate structure of Si 3 N 4 /SiO 2 . We propose to apply a new nanocomposite of carbon-palladium (C-Pd) film for this purpose.…”
Section: Introductionmentioning
confidence: 99%
“…DLC (diamond-like carbon), AlN, Al 2 O 3 ) [1,7,8] or 2D materials (e.g. graphene) [9] can be applied instead of commonly used stacked gate structure of Si 3 N 4 /SiO 2 . We propose to apply a new nanocomposite of carbon-palladium (C-Pd) film for this purpose.…”
Section: Introductionmentioning
confidence: 99%