2015
DOI: 10.1109/ted.2015.2395875
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TCAD-Based Simulation Method for the Electrolyte–Insulator–Semiconductor Field-Effect Transistor

Abstract: A simulation method for the electrolyte-insulatorsemiconductor field-effect transistor (EISFET)-type sensor is proposed based on a well-established commercialized semiconductor 3-D technology computer-aided design simulator. The proposed method relies on the fact that an electrolyte can be described using a modified intrinsic semiconductor material because of the similarity between the electrolyte and the intrinsic semiconductor. The electrical double layer of the electrolyte is characterized in the simulation… Show more

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Cited by 31 publications
(12 citation statements)
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“…Biomolecules are modeled as positive and negative charges on the gate oxide. Site-binding theory is used to model sensing mechanisms of target molecules with charges [13]. In multi-sensing simulations, negative/positive charges are attached on the source/drain side of the gate oxide respectively.…”
Section: Device Structure and Simulation Conditionsmentioning
confidence: 99%
“…Biomolecules are modeled as positive and negative charges on the gate oxide. Site-binding theory is used to model sensing mechanisms of target molecules with charges [13]. In multi-sensing simulations, negative/positive charges are attached on the source/drain side of the gate oxide respectively.…”
Section: Device Structure and Simulation Conditionsmentioning
confidence: 99%
“…In this study, we rigorously investigate the physical origins of the high I on sensitivity in the proposed structure by using TCAD simulations. 9 Moreover, the doping condition of the Region sense is optimized to maximize the I on sensitivity.…”
Section: Introductionmentioning
confidence: 99%
“…Ion-Sensitive Field-Effect Transistor (ISFET), which was first developed around 1970 [1], have attracted much attention for pH sensing applications because of its promising advantages compared to traditional methods based on glass electrodes or litmus papers. While glass electrodes are fragile, vulnerable to external stimuli, and difficult to be miniaturized, ISFETs are more resistant to damage, smaller in size, have relatively high sensitivity, and can be used at high temperature [2,3]. Moreover, ISFET can be produced on the top of matured FET technology [4] and feasible for use with micro/nano-systems.…”
Section: Introductionmentioning
confidence: 99%
“…Research work on ISFET has been made through various approaches including experimental characterization [7,8], modeling [9][10][11][12], and software simulation [2,3,8]. Regarding software simulation approach, it is usually based on using technology computer-aided design (TCAD) software of conventional MOSFETs, then, introducing some modifications to conform to ISFET operation [2,3]. This sometimes requires the work in two different platforms [2], or it alternatively uses lumped parameters for the electrolyte layer [3].…”
Section: Introductionmentioning
confidence: 99%
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