Taking into Account the Surface Roughness in the Electron-Probe Energy-Dispersive Analysis of Powder Materials

Пухов, Д. Э.; Lapteva, A. A.

doi:10.1134/s1027451020050146

Cited by 2 publications

(1 citation statement)

References 21 publications

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“…It is known that the EDXMA method gives the most accurate data at a voltage of 10-11 keV. The dependence of the measurement error of the elemental composition on the energy of the electron beam and the procedure for calculating the correction factors are given in [15]. The stoichiometric composition of the solid electrolyte (according to Table 2 data) is Li 3 PO 2.52 N 0.44 , which is close to the data of [16], where, using EDXMA and inductively coupled plasma, the composition of the sputtered LiPON film was determined as Li 2.99 PO 3.38 N 0.41 .…”

Section: Morphology and Elemental Composition Of Functional Layersmentioning

confidence: 99%

Effect of the Etching Profile of a Si Substrate on the Capacitive Characteristics of Three-Dimensional Solid-State Lithium-Ion Batteries

et al. 2021

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Along with the soaring demands for all-solid-state thin-film lithium-ion batteries, the problem of their energy density rise becomes very acute. The solution to this problem can be found in development of 3D batteries. The present work deals with the development of a technology for a 3D solid-state lithium-ion battery (3D SSLIB) manufacturing by plasma-chemical etching and magnetron sputtering technique. The results on testing of experimental samples of 3D SSLIB are presented. It was found that submicron-scale steps appearing on the surface of a 3D structure formed on Si substrate by the Bosch process radically change the crystal structure of the upper functional layers. Such changes can lead to disruption of the layers’ continuity, especially that of the down conductors. It is shown that surface polishing by liquid etching of the SiO2 layer and silicon reoxidation leads to surface smoothing, the replacement of the dendrite structure of functional layers by a block structure, and a significant improvement in the capacitive characteristics of the battery.

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Section: Morphology and Elemental Composition Of Functional Layersmentioning

confidence: 99%

Effect of the Etching Profile of a Si Substrate on the Capacitive Characteristics of Three-Dimensional Solid-State Lithium-Ion Batteries

et al. 2021

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Method for Correcting the Results of Energy-Dispersive Electron Probe Elemental Analysis of Powder Materials

Пухов

Lapteva

2022

J Anal Chem

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Taking into Account the Surface Roughness in the Electron-Probe Energy-Dispersive Analysis of Powder Materials

Cited by 2 publications

References 21 publications

Effect of the Etching Profile of a Si Substrate on the Capacitive Characteristics of Three-Dimensional Solid-State Lithium-Ion Batteries

Effect of the Etching Profile of a Si Substrate on the Capacitive Characteristics of Three-Dimensional Solid-State Lithium-Ion Batteries

Method for Correcting the Results of Energy-Dispersive Electron Probe Elemental Analysis of Powder Materials

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