Tailoring of TiO2 film microstructure by pulsed-DC and RF magnetron co-sputtering

Lelis, Martynas; Tučkutė, Simona; Varnagiris, Šarūnas; Urbonavičius, Marius; Laukaitis, Giedrius; Bočkutė, Kristina

doi:10.1016/j.surfcoat.2019.124906

Cited by 20 publications

(8 citation statements)

References 41 publications

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“…The rutile phase is formed in the MSPVD coatings, despite the relatively low temperature of the deposition process under specific process conditions, particularly with high magnetron power. Reference [34] contains similar dependencies. The titanium oxide layer obtained on the surface of the tested materials by the ALD method shows an amorphous structure, as evidenced by a slightly blurred microscopic image from this area (Figure 3b), characteristic of this type of atomic structure.…”

Section: Resultsmentioning

confidence: 99%

Investigations of TiO2/NanoTiO2 Bimodal Coatings Obtained by a Hybrid PVD/ALD Method on Al-Si-Cu Alloy Substrate

et al. 2022

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This study aimed to investigate the influence of bimodal TiO2/nanoTiO2 coatings obtained in the PVD/ALD hybrid process on an Al-Si-Cu-type aluminium alloy on the physicochemical properties of the investigated materials. The reference materials were uncoated substrates and samples coated with TiO2 coatings in single PVD and ALD processes. Tests were carried out on the morphology of coatings using scanning electron microscopy (SEM) and atomic force microscopy (AFM) to determine the structure of the tested coatings and their influence on physicochemical properties. The tests of physicochemical properties were carried out using the potentiodynamic and electrochemical impedance spectroscopy methods. The analysis of corrosion products obtained during the study of physicochemical properties was performed using SEM and EDS analysis. Based on the analysis of anode polarisation curves of the tested materials and Tafel analysis, it was found that a sample demonstrated the highest corrosion resistance with a bimodal coating-type TiO2/nanoTiO2, which had the lowest value of corrosion current and the highest value of polarisation resistance. The slightest corrosion resistance was characteristic for uncovered samples. Moreover, the influence of the tested coatings on the improvement of tribological contact of the surfaces of the coated materials with the counter-specimen made of cemented carbides was demonstrated.

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Section: Resultsmentioning

confidence: 99%

Investigations of TiO2/NanoTiO2 Bimodal Coatings Obtained by a Hybrid PVD/ALD Method on Al-Si-Cu Alloy Substrate

et al. 2022

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“…It not only has small absorption of visible light but also can absorb, scatter, or reflect a large amount of ultraviolet rays harmful to people and objects. At the same time, to prevent corrosion of Mo layer caused by oxygen and other substances at high temperature, tungsten trioxide, an N-type semiconductor metal oxide that has stable properties and excellent photoelectric conversion performance and photocorrosion resistance, can make more effective use of solar radiation energy (Álvarez-Fraga et al, 2014;Lelis et al, 2019;Firat, 2021).…”

Section: Resultsmentioning

confidence: 99%

Preparation of WO3/Mo/CrNi/TiO2 Composite Multifunctional Photothermal Conversion Films With Self-Cleaning and Low Emissivity

et al. 2022

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To improve the sunlight transmittance and infrared reflectivity, different membrane compositions are designed to realize self-cleaning and low emissivity of the membrane. The WO3/Mo/CrNi/TiO2 composite film was prepared by magnetron sputtering technology, and the complementary effect of these films with four different argon/oxygen ratios of TiO2 layer and different film thicknesses was analyzed. The microstructure characterization proves that the self-cleaning function of the composite film is determined by the photocatalytic properties and superhydrophilic properties of the TiO2.

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“…In comparison to evaporation plating and ion plating, sputtering has a lower deposition rate of 25-1000 nm min À1 as the deposited species should be ejected from a condensedmatter source by the impingement of energetic projectile particles. [452,453] However, some ceramics and refractory metals (i.e., having high melting points), which are difficult to deposit by evaporation plating, are prone to deposit by sputtering. Therefore, sputtering is a popular method that exhibits many advantages, including versatility and flexibility.…”

Section: Physical Vapor Depositionmentioning

confidence: 99%

Surface Modification of Titanium and Titanium Alloys: Technologies, Developments, and Future Interests

2020

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Thanks to a considerable number of fascinating properties, titanium (Ti) and Ti alloys play important roles in a variety of industrial sectors. However, Ti and Ti alloys could not satisfy all industrial requirements; the degradation of Ti and Ti alloys always commences on their surfaces in service, which declines the performances of Ti workpieces. Therefore, with aim to further improve their mechanical, corrosion and biological properties, surface modification is often required for Ti and Ti alloys. This article reviews the technologies and recent developments of surface-modification methods with respect to Ti and Ti alloys, including mechanical, physical, chemical, and biochemical technologies. Conventional methods have limited improvement in the properties and/or restriction on the geometry of workpieces. Therefore, many advanced surfacemodification technologies have emerged in recent decades. New methods make Ti and Ti alloys have better performance and extended applications. With requirement of high surface properties in future. Understanding the mechanism in various surface-modification methods, combining the advantages of current technologies and developing new coating materials with high performance are required urgently. As such, incorporation of different surface-modification technologies with high-performance modified layers may be the mainstream of surface modifications for Ti and Ti alloys. . His current research interests focus on the metal additive manufacturing (e.g., selective laser melting, electron beam melting), titanium alloys and composites, and processing-microstructureproperties in high-performance materials.

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Tailoring of TiO2 film microstructure by pulsed-DC and RF magnetron co-sputtering

Cited by 20 publications

References 41 publications

Investigations of TiO2/NanoTiO2 Bimodal Coatings Obtained by a Hybrid PVD/ALD Method on Al-Si-Cu Alloy Substrate

Investigations of TiO2/NanoTiO2 Bimodal Coatings Obtained by a Hybrid PVD/ALD Method on Al-Si-Cu Alloy Substrate

Preparation of WO3/Mo/CrNi/TiO2 Composite Multifunctional Photothermal Conversion Films With Self-Cleaning and Low Emissivity

Surface Modification of Titanium and Titanium Alloys: Technologies, Developments, and Future Interests

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