In this paper, ultra-precision cutting experiments were carried out with titanium alloy material Ti-6A1-4V by using single crystalline diamond tools. Experimental results show that the wear patterns of rake face of diamond tools are crater wear and groove wear, the wear patterns of flank face of diamond tools are uniform wear and groove wear, and the wear mechanisms of single crystalline diamond tool are chemical wear and mechanical wear. Graphitization and microcosmic cleavage of the diamond tools occur in the cutting process.