Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
DOI: 10.1109/sensor.1997.613596
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Tactile sensor using piezoelectric resonator

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Cited by 23 publications
(12 citation statements)
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“…In most cases, piezoelectric resonant-type sensors based on the inverse piezoelectric effect have been used for static measurement applications. The piezoelectric resonant sensor detects the change of the resonance conditions of a piezoelectric material induced by external stimuli [38][39][40][41][42][43][44][45][46]. This sensor also requires the voltage source to oscillate the resonator at a specific frequency [47][48][49].…”
Section: Static Force Measurement Using Piezoelectric Sensorsmentioning
confidence: 99%
“…In most cases, piezoelectric resonant-type sensors based on the inverse piezoelectric effect have been used for static measurement applications. The piezoelectric resonant sensor detects the change of the resonance conditions of a piezoelectric material induced by external stimuli [38][39][40][41][42][43][44][45][46]. This sensor also requires the voltage source to oscillate the resonator at a specific frequency [47][48][49].…”
Section: Static Force Measurement Using Piezoelectric Sensorsmentioning
confidence: 99%
“…This type of sensor has been used in many applications, including the detection of cancer, the measurement of eye pressure, evaluation of human ovum in fertility studies, and evaluation of the properties of the skin. [22][23][24][25][26] The theory behind such sensors is based on the physics of oscillating rods; indeed, their behavior can be described using the wave theory of vibration modes of a finite rod. The change in the resonance frequency of such a rod is related to the acoustic impedance of the object with which it is in contact 27,28 Df = À n 0 2pl…”
Section: Piezoelectric Resonance Sensorsmentioning
confidence: 99%
“…This type of sensor has been used in many applications, including the detection of cancer, the measurement of eye pressure, evaluation of human ovum in fertility studies, and evaluation of the properties of the skin. 2226…”
Section: Introductionmentioning
confidence: 99%
“…The sensors are easily arranged in an arrayed manner during fabrication if one needs a 2-D contact force distribution of the objects. In the resonant mode, the sensor detects the elasticity of the contacted object by using the change in resonance characteristics [9]. However, these previous works only focused on the detection of a single physical value (contact force or elasticity).…”
Section: Introductionmentioning
confidence: 99%