Tactile Sensor Using Micro-cantilever with BiFeO&lt;sub&gt;3&lt;/sub&gt; Piezoelectric Film

Mihara, Masato; Nozawa, Akito; Abe, Takashi; Okuyama, Masanori; Noma, Hiroyasu; Azuma, Teruaki; Sohgawa, Masayuki

doi:10.1541/ieejsmas.135.158

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Tactile Sensor Using Micro-cantilever with BiFeO<sub>3</sub> Piezoelectric Film

Cited by 2 publications

References 30 publications

Design, Modeling and Simulation of a Micro Tactile Sensor for Soft Tissue Stiffness Measurement with Three Tips Configuration

Design, Modeling and Simulation of a Micro Tactile Sensor for Soft Tissue Stiffness Measurement with Three Tips Configuration

Deposition and Characterization of Al<sub>2</sub>O<sub>3</sub> and BiFeO<sub>3</sub> Thin Films on Titanium Substrates for Tough MEMS Devices

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