Deposition and Characterization of Al&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;3&lt;/sub&gt; and BiFeO&lt;sub&gt;3&lt;/sub&gt; Thin Films on Titanium Substrates for Tough MEMS Devices

Kohno, Takeshi; Mihara, Masato; Tanabe, Ataru; Abe, Takashi; Okuyama, Masanori; Sohgawa, Masayuki

doi:10.1541/ieejsmas.137.46

IEEJ Trans. SM

2017

DOI: 10.1541/ieejsmas.137.46

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Deposition and Characterization of Al2O3 and BiFeO3 Thin Films on Titanium Substrates for Tough MEMS Devices

Takeshi Kohno

Masato Mihara

Ataru Tanabe

et al.

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Deposition and Characterization of Al<sub>2</sub>O<sub>3</sub> and BiFeO<sub>3</sub> Thin Films on Titanium Substrates for Tough MEMS Devices

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