Systems of multiple cluster tools: configuration, reliability, and performance

Lopez, M.J.; Wood, S.C.

doi:10.1109/tsm.2003.810936

Cited by 83 publications

(22 citation statements)

References 12 publications

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“…If the failure occurs on the processing unit holding the parity data, it can be restored at a later time while the useful data still being accessible to the users. Cluster reliability: A processing unit is considered to be in failure mode when it exhibits an abnormal behavior, in such a way that the results returned by the PU cannot be used either by the remaining PUs or by the users of the cluster [15][16][17] . The time between the detection of the error, leading to a failure and its first occurrence is called the error detection delay.…”

Section: Data Replication and Chained Desclusteringmentioning

confidence: 99%

Redundancy Schemes for High Availability Computer Clusters

Bassek¹,

Pierre²,

Quintero³

2006

J. of Computer Science

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Abstract:The primary goal of computer clusters is to improve computing performances by taking advantage of the parallelism they intrinsically provide. Moreover, their use of redundant hardware components enables them to offer high availability services. In this paper, we present an analytical model for analyzing redundancy schemes and their impact on the cluster's overall performance. Furthermore, several cluster redundancy techniques are analyzed with an emphasis on hardware and data redundancy, from which we derive an applicable redundancy scheme design. Also, our solution provides a disaster recovery mechanism that improves the cluster's availability. In the case of data redundancy, we present improvements to the replication and parity data replication techniques for which we investigate the availability of the cluster under several scenarios that take into account, among other things, the number of replicated nodes, the number of CPUs that hold parity data and the relation between primary and replicated data. For this purpose, we developed a simulator that analyzes the impact of a redundancy scheme on the processing rate of the cluster. We also studied the performance of two well-known schemes according to the usage rate of the CPUs. We found that two important aspects influencing the performance of a transaction-oriented cluster were the cluster's failover and data redundancy schemes. We simulated several data redundancy schemes and found that data replication offered higher cluster availability than the parity model.

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Section: Data Replication and Chained Desclusteringmentioning

confidence: 99%

Redundancy Schemes for High Availability Computer Clusters

Bassek¹,

Pierre²,

Quintero³

2006

J. of Computer Science

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“…According to Kim et al, 14 the time taken for the robot to move from one step to another can be treated as the same and is much shorter than the wafer processing time. In this case, a cluster tool operates in the process-bound region such that a backward scheduling strategy is optimal for a single-arm tool 15,16 and a swap scheduling strategy is optimal for a dual-arm tool. 5 The afore-mentioned studies are conducted under the assumption that there is no constraint on the wafer sojourn time in a PM.…”

Section: Introductionmentioning

confidence: 99%

Petri net-based scheduling of time constrained single-arm cluster tools with wafer revisiting

Liu

Yang

2016

Advances in Mechanical Engineering

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It is very difficult to schedule a single-arm cluster tool with wafer revisiting such that wafer residency time constraints are satisfied. This article conducts a study on this challenging problem for a single-arm cluster tool with atomic layer deposition process. With a so-called p-backward strategy being applied, a Petri net model is developed to describe the dynamic behavior of the system. Based on the model, the existence of a feasible schedule is analyzed, schedulability conditions are derived, and scheduling algorithms are presented if there is a schedule. A schedule is obtained by simply setting the robot waiting time if schedulable, and it is very computationally efficient. The obtained schedule is shown to be optimal. Illustrative examples are given to demonstrate the proposed approach.

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“…For cluster tools, the robot moving times from one PM to another can be treated as a constant and are much shorter than the wafer processing times [15]. Thus, backward scheduling is optimal for single-arm cluster tools [16,17]. A swap scheduling method is shown to be efficient for dual-arm cluster tools [6].…”

Section: Introductionmentioning

confidence: 99%

Petri net-based scheduling analysis of dual-arm cluster tools with wafer revisiting

Qiao

Zhou

2012

2012 IEEE International Conference on Automation Science and Engineering (CASE)

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With wafer revisit, it is complicated to schedule cluster tools in semiconductor fabrication. In wafer fabrication processes, such as atomic layer deposition (ALD), the wafers need to visit some process modules for a number of times. The existing swap-based strategy can be used to operate a dual-arm cluster tool for such a process. It results in a 3-wafer cyclic schedule. However, it is not optimal in the sense of cycle time. Thus, to search for a better schedule, a Petri net model is developed for a dual-arm cluster tool with wafer revisit. With it, the properties of the 3-wafer schedule are analyzed. It is found that, to improve the performance, it is necessary to reduce the number of wafers completed in a cycle. Thus, a 1-wafer schedule is developed by using a new swap-based strategy.

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Systems of multiple cluster tools: configuration, reliability, and performance

Cited by 83 publications

References 12 publications

Redundancy Schemes for High Availability Computer Clusters

Redundancy Schemes for High Availability Computer Clusters

Petri net-based scheduling of time constrained single-arm cluster tools with wafer revisiting

Petri net-based scheduling analysis of dual-arm cluster tools with wafer revisiting

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