2022
DOI: 10.1002/pssb.202200103
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Systematic Evolution of Optical Bandgap and Local Chemical State in Transparent MgO and HfO2 Resistive Switching Materials

Abstract: Metal oxides have attracted significant interest in recent decades owing to their feasible application in resistive switching devices, semiconductor devices, heterogeneous catalysts, optoelectronic devices, and gas-sensing systems. [1][2][3] Moreover, the potential of these metal oxides to substitute SiO 2 gate dielectrics in metaloxide-semiconductor (MOS) systems to overcome the leakage current limitation strengthens the quest in academic and industry curiosity.

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Cited by 3 publications
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“…Out of the two, PVD typically requires high processing temperature and is not suitable for coating complex structures [ 20 ]. There have been many advances in PVD techniques, such as ion-beam assisted deposition (IBAD) [ 21 , 22 ] and RF sputtering [ 23 ], to allow lower deposition temperatures, but these usually involve the use of high energy sources which might damage the collagen structure [ 24 , 25 ]. In fact, IBAD of MgO has also been reported at room temperature on glass(SiO 2 ) substrates [ 22 ], however due to the well-documented damage ion beams can have on organic matter, it was not considered suitable.…”
Section: Introductionmentioning
confidence: 99%
“…Out of the two, PVD typically requires high processing temperature and is not suitable for coating complex structures [ 20 ]. There have been many advances in PVD techniques, such as ion-beam assisted deposition (IBAD) [ 21 , 22 ] and RF sputtering [ 23 ], to allow lower deposition temperatures, but these usually involve the use of high energy sources which might damage the collagen structure [ 24 , 25 ]. In fact, IBAD of MgO has also been reported at room temperature on glass(SiO 2 ) substrates [ 22 ], however due to the well-documented damage ion beams can have on organic matter, it was not considered suitable.…”
Section: Introductionmentioning
confidence: 99%