Synthetic Data in Quantitative Scanning Probe Microscopy

Abstract

Synthetic data are of increasing importance in nanometrology. They can be used for development of data processing methods, analysis of uncertainties and estimation of various measurement artefacts. In this paper we review methods used for their generation and the applications of synthetic data in scanning probe microscopy, focusing on their principles, performance, and applicability. We illustrate the benefits of using synthetic data on different tasks related to development of better scanning approaches and related to estimation of reliability of data processing methods. We demonstrate how the synthetic data can be used to analyse systematic errors that are common to scanning probe microscopy methods, either related to the measurement principle or to the typical data processing paths.

Demystifying data evaluation in the measurement of periodic structures

“…The goal of this paper is to systematically assess the performance of various evaluation methods for periodic structures. Therefore, the methodology is purely based on numerical simulations, using synthetic data with known parameters [36]. Using the data synthesis tools in the open source AFM data analysis software Gwyddion [37], grating surfaces with different properties and both deterministic and random distortions were generated.…”

“…Therefore, this work employs simulations in order to study them and reveal how the accuracy of results depends on measurement parameters. This requires the generation of realistic artificial AFM data with prescribed parameters and defects [36]. In this work it was based on Gwyddion libraries and modules.…”

New method for real-time visualization and quantitative characterization of early colorectal cancer in endoscopy: a pilot study

“…For the BEE process, we use a free and open source software, covered by GNU General Public License, which can process data on height fields usually obtained by scanning probe microscopy (gwyddion.net, [7]). In the context of BEE, the software is used for image processing of HD-WLE pictures.…”

Reporting SERS enhancement factor: molecular surface coverage standards by grazing-incidence X-ray fluorescence.

“…Consequently, the 1/k correction factor in equation ( 2) was evaluated as (0.9925 ± 0.0014). The uncertainty was evaluated by combining additional measurements in non-ideal conditions and simulations using synthetic tools in Gwyddion [22], considering the variations across the sample (largest contribution), microscope calibration, feedback loop faults, leveling, tip convolution, and noise.…”