Straightforward syntheses of selected nondeuterated, partially deuterated, and fully deuterated room temperature ionic liquids (ILs) with the anions tris(pentafluoroethyl)trifluorophosphate, tetracyanoborate, and methyl sulfate were developed. The viscosity and the density of these ionic liquids were measured at various temperatures. The dissociation rate of the ionic liquid, the sizes of the cation and the anion, and the nature of the inter-ionic interaction are not influenced by deuteration, but viscosity is. All deuterated ionic liquids possess a higher viscosity and density in comparison to non-deuterated ones. The explanation of this phenomenon is given and discussed based on the modified Stokes-Einstein equation with a parameter which reflects the mass of the diffused particles. This new knowledge supports the recent development of novel low viscous inert ionic liquids which are of particular interest for the application in energy conversion devices. Deuterated ionic liquids are valuable media for the investigation of chemical reactions, natural products, and bio-materials by means of the NMR spectroscopy.