2017
DOI: 10.3390/nano7050097
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Synthesis of Pt@TiO2@CNTs Hierarchical Structure Catalyst by Atomic Layer Deposition and Their Photocatalytic and Photoelectrochemical Activity

Abstract: Pt@TiO2@CNTs hierarchical structures were prepared by first functionalizing carbon nanotubes (CNTs) with nitric acid at 140 °C. Coating of TiO2 particles on the CNTs at 300 °C was then conducted by atomic layer deposition (ALD). After the TiO2@CNTs structure was fabricated, Pt particles were deposited on the TiO2 surface as co-catalyst by plasma-enhanced ALD. The saturated deposition rates of TiO2 on a-CNTs were 1.5 Å/cycle and 0.4 Å/cycle for substrate-enhanced process and linear process, respectively. The sa… Show more

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Cited by 15 publications
(8 citation statements)
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“…TiO2 coatings are widely used in self-cleaning technologies 65 , as an electrode support 66 , as a dielectric medium 67 , and in photocatalysis 68 . ALD grown TiO2 nanofilms have been used in many applications: corrosion protection layers on copper 69 , in high-κ dielectrics, solar cells (perovskite) 70 , carbon nanotubes 71 and composite nanostructures for water splitting to name a few 72 . In this article, a proof-of-concept technique for vapor phase infiltration of covalently grafted polymer brushes to produce wafer-scale TiO2 with high uniformity is demonstrated on Si substrates.…”
Section: Introductionmentioning
confidence: 99%
“…TiO2 coatings are widely used in self-cleaning technologies 65 , as an electrode support 66 , as a dielectric medium 67 , and in photocatalysis 68 . ALD grown TiO2 nanofilms have been used in many applications: corrosion protection layers on copper 69 , in high-κ dielectrics, solar cells (perovskite) 70 , carbon nanotubes 71 and composite nanostructures for water splitting to name a few 72 . In this article, a proof-of-concept technique for vapor phase infiltration of covalently grafted polymer brushes to produce wafer-scale TiO2 with high uniformity is demonstrated on Si substrates.…”
Section: Introductionmentioning
confidence: 99%
“…For example, catalyst deposition method such as impregnation results in particle agglomeration resulting in the formation of metal clusters, while electrodeposition and photodeposition offer much less control over uniform deposition. [ 130 ]…”
Section: Ald In Water Splittingmentioning
confidence: 99%
“…Although metal particles are usually applied to photocathodes from solution by electro‐ or photoelectro‐reduction, ALD was used for the preparation of highly dispersed particles ( Figure a,b) on high‐aspect‐ratio structures such as nanowires. [ 158–160 ] ALD is a promising method to reduce the usage of precious metals, as already one ALD cycle is enough to activate the photocathode, and three cycles were found to uniformly cover the surface with Pt nanoparticles from 0.5 to 3 nm. [ 159 ] Another promising HER catalyst, molybdenum disulfide (MoS 2 ) has only recently become available for ALD deposition, [ 161 ] due to lack of suitable precursors.…”
Section: Catalystmentioning
confidence: 99%