2017
DOI: 10.1007/s10854-017-7473-6
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Synthesis of orthorhombic-molybdenum trioxide (α-MoO3) thin films by hot wire-CVD and investigations of its humidity sensing properties

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Cited by 49 publications
(22 citation statements)
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“…We observe that (i) there are no sharp peaks in the spectra and (ii) the signal can be likely referred to as some background due to the substrate [56], indicating that the material is amorphous. Presence of broad peaks of low intensity at 470 and 830 cm −1 , related to the stretching mode for α-MoO3 crystalline phase [57], can be noted in the as-deposited and in the annealed at 100 °C sample; these peaks decrease at 250 °C while the one at 970 cm −1 starts to increase suggesting that the material maintains the amorphous disordered structure and a longer annealing time with a higher temperature is required to start crystallization [40,52]. Similar behavior was measured for 20-nm and 50-nm thick samples annealed in Air and H2, but they are not reported here for the sake of brevity.…”
Section: Chemical and Structural Characterizationmentioning
confidence: 98%
“…We observe that (i) there are no sharp peaks in the spectra and (ii) the signal can be likely referred to as some background due to the substrate [56], indicating that the material is amorphous. Presence of broad peaks of low intensity at 470 and 830 cm −1 , related to the stretching mode for α-MoO3 crystalline phase [57], can be noted in the as-deposited and in the annealed at 100 °C sample; these peaks decrease at 250 °C while the one at 970 cm −1 starts to increase suggesting that the material maintains the amorphous disordered structure and a longer annealing time with a higher temperature is required to start crystallization [40,52]. Similar behavior was measured for 20-nm and 50-nm thick samples annealed in Air and H2, but they are not reported here for the sake of brevity.…”
Section: Chemical and Structural Characterizationmentioning
confidence: 98%
“…In particular, because of the large numbers of dangling bonds and structural defects, the amorphous MoO 3 is characterized by more easily dissolving in water than does crystalline MoO 3 . Figure a,b shows the etching behavior and the Raman spectra of the deposited MoO 3 film after heat treatment from room temperature to 50, 100, and 200°C, respectively, for 1 h. The MoO 3 thin film (30 nm thick) deposited at room temperature is predominantly amorphous phase (≈950 cm −1 ), and completely disappeared just after dipping into the water . The vigorous and rapid reaction between amorphous MoO 3 and H 2 O may lead to irreversible cracks of graphene .…”
Section: Resultsmentioning
confidence: 99%
“…There are minor displacements in the peaks position in the Raman spectrum, which are related to the changes in the constant of the strength bonds of the nucleus. The larger constant force leads to positive displacement in the peaks and the smaller constant force leads to a negative displacement in the peaks [14,15]. Figure 5 shows the surface morphology of MoO3 thin film which is studied using FESEM observations in different scales.…”
Section: Structural and Morphological Analysismentioning
confidence: 99%