2012
DOI: 10.1016/j.mee.2012.02.047
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Synthesis of non-rigid core–shell structured PS/SiO2 composite abrasives and their oxide CMP performance

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Cited by 24 publications
(10 citation statements)
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“…As for ferrihydrite, the bands at around 1356 and 1480 cm À1 are assigned to FeÀ OH and FeÀO species, respectively. The strong absorption band at about 1022-1065 cm À1 in the spectra of Fe-SiO 2 -x is associated with the transverse-optical (TO) mode of the Si À O À Si asymmetric stretching vibration [44][45][46] and the shoulder at about 950 cm À1 is characteristic of hydrated SiO 2 wet gel. [43] Thus, there are some PEG molecules trapped inside the ferrihydrite.…”
Section: Samplementioning
confidence: 99%
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“…As for ferrihydrite, the bands at around 1356 and 1480 cm À1 are assigned to FeÀ OH and FeÀO species, respectively. The strong absorption band at about 1022-1065 cm À1 in the spectra of Fe-SiO 2 -x is associated with the transverse-optical (TO) mode of the Si À O À Si asymmetric stretching vibration [44][45][46] and the shoulder at about 950 cm À1 is characteristic of hydrated SiO 2 wet gel. [43] Thus, there are some PEG molecules trapped inside the ferrihydrite.…”
Section: Samplementioning
confidence: 99%
“…[43] Thus, there are some PEG molecules trapped inside the ferrihydrite. The strong absorption band at about 1022-1065 cm À1 in the spectra of Fe-SiO 2 -x is associated with the transverse-optical (TO) mode of the Si À O À Si asymmetric stretching vibration [44][45][46] and the shoulder at about 950 cm À1 is characteristic of hydrated SiO 2 wet gel. [47] Based on the spectra of the Fe-SiO 2 -x samples, the TO mode of the Si À O À Si asymmetric stretching vibration band shows a blueshift of around 43 cm À1 with increasing aging time (from 1022 cm À1 for Fe-SiO 2 -1 to 1065 cm À1 for Fe-SiO 2 -5), owing to the higher surface concentration of SiO 2 in the samples that are prepared with prolonging aging times.…”
Section: Samplementioning
confidence: 99%
“…W-CMP results indicated that the W removal rate was a strong function of both Fe ions and peroxide concentration. In recent years, core-shell structured composite abrasives, such as SiO 2 /CeO 2 [8], polymethylmethacrylate (PMMA)/SiO 2 [9], PMMA/CeO 2 [10], polystyrene (PS)/CeO 2 [11,12] and PS/SiO 2 [13,14], have become a hot research topic in CMP technology. SiO 2 -and Cu-CMP tests showed that the core-shell composite abrasives were in favor of increasing MRR and decreasing mechanical damage due to the synergistic effect of a core and a shell.…”
Section: Introductionmentioning
confidence: 99%
“…In particular, polystyrene-based polymeric colloids containing functional groups have been mostly employed as cores (Imhof 2001;Kim et al 2006). Uniform and controllable sizes, large surface areas, adsorption capacities, and easy preparations of polymeric colloids make them attractive core and/or template materials in the preparations of colloidal organic@inorganic core-shell nanohybrids incluing PS@TiO 2 (Karabacak et al 2014;Shi et al 2012), PS@Fe 3 O 4 (Fang et al 2009), PS@SiO 2 (Mu and Fu 2012), PS@CdS (Wang et al 2007, Zhang et al 2005, PS@CdTe (Rogach et al 2000), PS@ZnS (Huang et al 2007;Yin et al 2003), etc. Moreover, depending upon the type of semiconductivity of the shell, they exhibited various properties such as magnetic, electrical, catalytic, and optical, and therefore have extensive potential applications in the fields of medical science, biology, catalysts, coatings, and in many other fields (Coşkun and Korkmaz 2014;Ghosh Chaudhuri and Paria 2011;Radmilovic et al 2011;Shenoy et al 2003;Zhang et al 2010).…”
Section: Introductionmentioning
confidence: 99%