Atomic force microscopy indentation to determine mechanical property for polystyrene–silica core–shell hybrid particles with controlled shell thickness

Chen, Yang; Cheng, Qian; Miao, Naiming

doi:10.1016/j.tsf.2015.02.049

Cited by 34 publications

(20 citation statements)

References 50 publications

(48 reference statements)

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“…460 cm −1 is attributed to the Si−O−Si bending vibration. 12,25 The results reveal that the polystyrene/silica sample structurally consists of SiO 2 .…”

Section: Resultsmentioning

confidence: 93%

Synthesis and Nanomechanical Properties of Polystyrene/Silica Core/Shell Particles Via Atomic Force Microscopy

2021

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Due to the unique properties of core/shell particles, these structures have been considered in various applications. Employing core/shell particles consisting of a polymer core and a ceramic shell as an abrasive in a chemical mechanical planarization (CMP) process enhanced the quality of processed wafers. In the present study, polystyrene/silica core/shell particles were synthesized and the elastic modulus was examined via atomic force microscopy (AFM). The impact of the indentation depth and contact mechanics models on the elastic modulus was studied. Also, the plastic properties of particles were examined for the first time. Using the Hertz model and a diamond-like carbon (DLC) probe, the elastic moduli of the polymer and core/shell particles were measured at 2.82 ± 0.03 and 6.53 ± 0.05 GPa, respectively.

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“…460 cm −1 is attributed to the Si−O−Si bending vibration. 12,25 The results reveal that the polystyrene/silica sample structurally consists of SiO 2 .…”

Section: Resultsmentioning

confidence: 93%

Synthesis and Nanomechanical Properties of Polystyrene/Silica Core/Shell Particles Via Atomic Force Microscopy

2021

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“…For example, as previously reported, porous silica abrasives turn out to be a better choice than conventional solid spheres due to their superior surface-flattening and damage-eliminating abilities, which can be attributed to their preferable elastic deformation ability [43,46,47]. In fact, the dependence of E values on porous silica shell thicknesses in the core-mesoporous shell structured composites has been largely vindicated in some literatures [48][49][50]. Moreover, Jauffrès et al [51] concluded employing nanoindentation and finite element model that mesoporous thin silica films with a lattice-ordered porosity exhibit a higher indentation modulus and a more elastic recovery behavior relative to random macroporous ones.…”

Section: Introductionmentioning

confidence: 88%

Non-spherical abrasives with ordered mesoporous structures for chemical mechanical polishing

et al. 2021

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The chemical mechanical polishing (CMP) technology has been widely used for surface modification of critical materials and components with high quality and efficiency. In a typical CMP process, the mechanical properties of abrasives play a vital role in obtaining the ultra-precision and damage-free surface of wafers for improvement of their performances. In this work, a series of fine structured rod-shaped silica (RmSiO 2 )-based abrasives with controllable sizes and diverse ordered mesoporous structures were synthesized via a soft template approach, and successfully applied in the sustainable polishing slurry for improving the surface quality of cadmium zinc telluride (CZT) wafers. Compared with commercial silica gel, solid and mesoporous silica spheres, the RmSiO 2 abrasives present superior elastic deformation capacity and surface precision machinability on account of their mesoporous structures and rod shapes. Especially, ultra-precision surface roughness and relatively effective material removal speed were achieved by the CMP process using the RmSiO 2 abrasives with a length/diameter (L/d) ratio of 1. In addition, a potential CMP mechanism of the developed polishing slurry to CZT wafer was elucidated by analyzing X-ray photoelectron spectra and other characterizations. The proposed interfacial chemical and mechanical effects will provide a new strategy for improving abrasives' machinability and precision manufacture of hard-to-machine materials.

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“…Compared with conventional abrasives, core–shell structured abrasives have many advantages. The elastic moduli of the abrasives can be adjusted by controlling the hardness of core materials and the thickness of the shells to fit the substrates [ 93 ]. The soft core can deform elastically and increase the real contact area between abrasives and substrates to reduce the contact stress and prevent the appearance of the scratches on substrates.…”

Section: Applicationsmentioning

confidence: 99%

Synthesis of Core–Shell Micro/Nanoparticles and Their Tribological Application: A Review

Chen

Lin

et al. 2020

Materials

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Owing to the diverse composition, adjustable performance, and synergistic effect among components, core–shell micro/nanoparticles have been widely applied in the field of tribology in recent years. The strong combination with the matrix and the good dispersion of reinforcing fillers in the composites could be achieved through the design of core–shell structural particles based on the reinforcing fillers. In addition, the performance of chemical mechanical polishing could be improved by optimizing the shell material coated on the abrasive surface. The physical and chemical state of the core–shell micro/nanoparticles played important effects on the friction and wear properties of materials. In this paper, the synthesis methods, the tribological applications (acted as solid/liquid lubricant additive, chemical mechanical polishing abrasives and basic units of lubricant matrix), and the functionary mechanisms of core–shell micro/nanoparticles were systematically reviewed, and the future development of core–shell micro/nanoparticles in tribology was also prospected.

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Atomic force microscopy indentation to determine mechanical property for polystyrene–silica core–shell hybrid particles with controlled shell thickness

Cited by 34 publications

References 50 publications

Synthesis and Nanomechanical Properties of Polystyrene/Silica Core/Shell Particles Via Atomic Force Microscopy

Synthesis and Nanomechanical Properties of Polystyrene/Silica Core/Shell Particles Via Atomic Force Microscopy

Non-spherical abrasives with ordered mesoporous structures for chemical mechanical polishing

Synthesis of Core–Shell Micro/Nanoparticles and Their Tribological Application: A Review

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