2009
DOI: 10.1016/j.apsusc.2009.01.066
|View full text |Cite
|
Sign up to set email alerts
|

Synthesis of nano-crystalline zirconium aluminium oxynitride (ZrAlON) composite films by dense plasma Focus device

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
2

Citation Types

1
21
0

Year Published

2011
2011
2017
2017

Publication Types

Select...
7
2

Relationship

2
7

Authors

Journals

citations
Cited by 39 publications
(22 citation statements)
references
References 41 publications
1
21
0
Order By: Relevance
“…The ion energy flux on substrate surface is related to the focusing efficiency of PF device which is indicated by the intensity of voltage probe signal; more intense the voltage probe signal, higher will be the ion energy flux [36,37,39]. Moreover, the intensity of voltage probe signal depends on the working gas pressure (Fig.…”
Section: Structural Analysismentioning
confidence: 99%
See 1 more Smart Citation
“…The ion energy flux on substrate surface is related to the focusing efficiency of PF device which is indicated by the intensity of voltage probe signal; more intense the voltage probe signal, higher will be the ion energy flux [36,37,39]. Moreover, the intensity of voltage probe signal depends on the working gas pressure (Fig.…”
Section: Structural Analysismentioning
confidence: 99%
“…It is a source of neutrons, X-rays, highly energetic ions and relativistic electrons [29][30][31]. These energetic ions and relativistic electrons have been used to deposit different films of industrial applications [32][33][34][35][36][37][38][39][40][41][42][43].…”
Section: Introductionmentioning
confidence: 99%
“…It is a source of neutrons, X-rays, highly energetic ions and relativistic electrons [17,18]. These energetic ions have been used: (i) for processing of various thin films [19][20][21] by irradiating them at different axial positions from the anode for implantation of nitrogen [22] and carbon [23] ions into different substrates, and (ii) for deposition of thin films of carbon [24], titanium carbide [25], titanium nitride [26], zirconium nitride [27], zirconium oxynitride [28] and zirconium aluminium oxynitride [29].…”
Section: Introductionmentioning
confidence: 99%
“…[20][21][22][23] Khan et al 24 studied the crystal structure, surface morphology, elemental distribution and microhardness of ZrAlON film. A Table 1 The composition of raw powders (in wt%) selected for fabricating the ZrN-Alon composites in the present study.…”
Section: Introductionmentioning
confidence: 99%