Synthesis of iron oxide films by reactive magnetron sputtering assisted by plasma emission monitoring

Abstract

Iron oxide films were synthesized by pulsed-DC magnetron sputtering from a metallic target in Ar and O2 gas mixtures. Plasma emission monitoring was implemented to accurately control the metalto-oxygen ratio in the coating through the chemical state of the iron target. The intensity of the Fe* emission line was maintained at a given value (setpoint) in regulating the introduced oxygen flow rate. In addition, the oxidation rate of the growing film was adjusted by controlling the oxidationto-deposition rate ratio as a function of the position of the substrates relative to the magnetron axis.The iron oxide films were characterized by X-ray diffraction, UV-VIS spectrophotometry, electrical measurement and vibrating sample magnetometry. In addition to the crystallization of 2 pure hematite and magnetite phases, both phases coexist in a transition domain for a short range of setpoint depending on the oxidation-to-deposition rate ratio. The electrical, optical and magnetic behaviors of the FeOx films suggest that the relative proportion of phases can be tailored in this range. The FeOx film behaviors can then be tuned from the hematite semi-conductor properties to the semi-metallic magnetite properties.

Influence of substrate temperature on delafossite CuFeO2 films synthesized by reactive magnetron sputtering

“…This corresponds to a poor transparency of delafossite films (only about a few percent and up to 30 % transmittance loss at 420 nm). The average transmittance in the visible range progressively decreases when increasing the deposition temperature to become fully opaque at 550 °C due to the crystallization of magnetite and copper phases (Table 1) [31]. Optical properties cannot be determined with our used methods due to their strong absorbance and reflectance in the studied wavelength.…”

Magnetic properties of hematite (α − Fe2O3) nanoparticles synthesized by sol-gel synthesis method: The influence of particle size and particle size distribution

“…Iron(III) oxides show remarkable magnetic properties, both for fundamental investigations and practical applications. The magnetic properties of these materials have been shown to depend on their size, shape, and microstructure [11][12][13][14][15][16]. In particular, iron(III) oxides are an attractive group of materials with a wide range of magnetic properties, from antiferromagnetic, superparamagnetic and weak ferromagnetic to ferrimagnetic [17][18][19][20][21][22][23][24][25][26][27][28][29][30].…”

Ecological Drawbacks of Nanomaterials Produced on an Industrial Scale: Collateral Effect on Human and Environmental Health

“…Thin and thick films of AlO-ENPs are used in microelectronics and catalysis, also as a diffusion barrier, thermal barrier, and water-resistant coatings for cutting tools. Besides, γ-alumina, which is a metastable phase, is used in catalysis due to its large surface area (Aubry et al, 2019 ). Also, γ-Al 2 O 3 is considered the most effective adsorbent, not only for its high surface area but even for its enhanced reactivity for adsorption and mass transfer efficiency (Nayar et al, 2014 ).…”

“…Also, γ-Al 2 O 3 is considered the most effective adsorbent, not only for its high surface area but even for its enhanced reactivity for adsorption and mass transfer efficiency (Nayar et al, 2014 ). At the same time, the anodic alumina templates are used for the synthesis of nanowires (Aubry et al, 2019 ).…”