2008
DOI: 10.1088/0022-3727/41/5/055309
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Synthesis of DLC films with different sp2/sp3ratios and their hydrophobic behaviour

Abstract: Diamond-like carbon (DLC) films were deposited on glass substrate by sputtering of a vitreous carbon target in Ar + H2 plasma. The sp2/sp3 content in the films depended on the relative amount of hydrogen in the Ar + H2 plasma. The films were characterized by Fourier transformed infrared studies, Raman studies, scanning electron microscopy, atomic force microscopy and optical measurements. Hydrophobicity in these films was studied by measuring the contact angles of the water droplets and it was found that the f… Show more

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Cited by 113 publications
(67 citation statements)
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“…5 shows the Raman spectra of the deposited DLC films. The observed G and D peaks in the four kinds of the films reveal the existence of both sp2-type and sp3-type carbon bonding in the DLC films [14]. By fitting procedures, the intensity ratio of D band to G band (I D /I G ) for samples a, b, c, and d has been found to be about 0.66, 1.38, 1.96 and 3.2, respectively.…”
Section: Raman Spectroscopy Analysismentioning
confidence: 88%
“…5 shows the Raman spectra of the deposited DLC films. The observed G and D peaks in the four kinds of the films reveal the existence of both sp2-type and sp3-type carbon bonding in the DLC films [14]. By fitting procedures, the intensity ratio of D band to G band (I D /I G ) for samples a, b, c, and d has been found to be about 0.66, 1.38, 1.96 and 3.2, respectively.…”
Section: Raman Spectroscopy Analysismentioning
confidence: 88%
“…The I D /I G ratio increases from 1.82 to 2.41 with increase of the argon-acetylene ratio from 100 to 200. Thus, the D (1410 cm −1 ) and G (1617 cm −1 ) bands are shifted to higher wave number range, compared to the typical D and G peaks [8,17]. This is related to high internal stresses in the coating.…”
Section: Raman Scattering Spectroscopymentioning
confidence: 94%
“…Meanwhile, the coating produced at Ar/C 2 H 2 = 150, beside D (1386 cm −1 ) and G (1610 cm −1 ) peaks, has a narrow band at 1447 cm −1 . This peak is attributed to a C5 A g (2) pentagonal pinch mode or due to relaxation of the photon selection rules for nanocrystalline materials [17,18]. The film deposited at the highest Ar/C 2 H 2 ratio has only D and G peaks centred at 1382 and 1609 cm −1 , respectively.…”
Section: Raman Scattering Spectroscopymentioning
confidence: 97%
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“…The structure of DLC lm is a mixture of some graphitic sp 2 and aliphatic sp 3 bonding and the fraction ratio of them (sp 3 /sp 2 ) strongly ascertains the physical properties of it. In general, although the mechanical and chemical characteristics are governed by amount of the sp 3 bonding, electronic and optical properties are associated to fraction of the sp 2 bonding [5,6]. Therefore, it is essential to have precise control on the fraction ratio to deposit a favorite layer relevance to the applications.…”
Section: Introductionmentioning
confidence: 99%