Abstract:Dual-frequency plasma enhanced chemical vapor deposition was used to grow diamond-like carbon thin lms from CH4, H2 gas mixture. The eects of radio frequency, microwave power, and gas ratio were investigated. Various species have been identied in the CH4H2 plasma using optical emission spectroscopy and their eects on lm properties have been studied. Increasing the RF power to 400 W, the variation trend of refractive index and CH, C2 intensity ratios change beyond the 300 W, but the growth rate shows the contin… Show more
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