Synthesis of c-Axis Inclined AlN Films in an Off-Center System for Shear Wave Devices

Xiong, Juan; Gu, Haoshuang; Wu, Wen; Hu, Mingzhe; Du, Pengfei; Xie, Hong Tao

doi:10.1007/s11664-011-1662-5

Cited by 8 publications

(7 citation statements)

References 24 publications

(19 reference statements)

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“…Therefore, the development of wurtzite (002) or c-axis oriented phase of AlN NFs is vital for most of these applications to obtain higher values of the electromechanical coupling factor, k2t [108]. So far, several methods have been developed for AlN TFs deposition, such as chemical vapour deposition [108,109], pulsed laser ablation deposition [110,111], molecular beam epitaxy [112], the electron shower method [113], dual ion beam deposition [114,115], reactive radio-frequency (RF) magnetron sputtering [116][117][118], reactive mid-frequency (MF) reactive sputtering [119], reactive pulsed direct-current (DC) unbalanced magnetron sputtering [120] and hydride vapour phase epitaxy (HVPE) [121][122][123][124][125]. Most of these methods can be applied to grow AlN TFs that are preferentially oriented to the c-axis on various substrates under suitable deposition conditions.…”

Section: D Aln Thin Films (Tfs)mentioning

confidence: 99%

“…By optimising these parameters, AlN TFs with preliminarily designed properties can be grown successfully. [116], (c) [117]); (d) [118]).…”

Section: D Aln Thin Films (Tfs)mentioning

confidence: 99%

“…2D AlN NSs: (a, b) Nanobelts [98,100]), (c) Nanobelts and nanoplates [101]), (d) Nanosheets [102]); B. Thin films: cross-sectional FESEM images of AlN; (a) [111], (b) [116], (c) [117]); (d) [118]).…”

Section: Synthesis and Characterisationmentioning

confidence: 99%

“…Reactive magnetron sputtering is another preferred method for thin film deposition due to the low deposition temperature of the method. Xiong et al [116] deposited AlN thin films on a p-type (100) silicon wafer coated with a 100 nm Pt layer in a radio frequency (RF) magnetron sputtering system (JGP 450). The column inclination varied from 5° (for the sample deposited at a rotation angle of 5°) to 12° (for the sample deposited at a rotation angle of 5–10°) (Figure 4(B, b)).…”

Section: Synthesis and Characterisationmentioning

confidence: 99%

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Morphological diversity of AlN nano- and microstructures: synthesis, growth orientations and theoretical modelling

Nersisyan

Lee

Kim

et al. 2019

International Materials Reviews

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Recent developments have seen breakthroughs in zero-, one-, two-, and three-dimensional AlN micro-and nanostructures, such as nanoparticles, nanowires, nanotubes, thin films and 3D multifold symmetry crystals. The attractive electrical, optical, and thermal properties of AlN make these materials irreplaceable for microelectrochemical systems (MEMS), surface acoustic waves (SAWs) and light emitting diodes (LED). The significant interest in the field of AlN nanostructure synthesis and application encouraged us to summarise the reported data to better understand the physical and chemical aspects of AlN crystal growth processes. Four main topics are covered in this review article: (1) the morphological diversity of AlN nanoand microstructures; (2) formation mechanisms and growth dynamics; (3) theoretical simulation of growth processes based on density functional theory (DFT) and phase field (PF) modelling approaches; (4) application and devices. This article also provides a perspective on future research relevant to AlN micro-and nanostructures.

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Section: D Aln Thin Films (Tfs)mentioning

confidence: 99%

“…By optimising these parameters, AlN TFs with preliminarily designed properties can be grown successfully. [116], (c) [117]); (d) [118]).…”

Section: D Aln Thin Films (Tfs)mentioning

confidence: 99%

Section: Synthesis and Characterisationmentioning

confidence: 99%

Section: Synthesis and Characterisationmentioning

confidence: 99%

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Morphological diversity of AlN nano- and microstructures: synthesis, growth orientations and theoretical modelling

Nersisyan

Lee

Kim

et al. 2019

International Materials Reviews

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“…A detailed description of the fabrication process is given in our previous work [14]. The metal films were deposited using the JGP450 sputtering system.…”

Section: Fabrication Of Fbarmentioning

confidence: 99%

Detection of a carcinoembryonic antigen using aptamer-modified film bulk acoustic resonators

Zheng¹,

Xiong²,

Guo³

et al. 2014

Materials Research Bulletin

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Influence of Substrate Temperature on Structural Properties and Deposition Rate of AlN Thin Film Deposited by Reactive Magnetron Sputtering

Jin

Feng

et al. 2012

Journal of Elec Materi

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Synthesis of c-Axis Inclined AlN Films in an Off-Center System for Shear Wave Devices

Cited by 8 publications

References 24 publications

Morphological diversity of AlN nano- and microstructures: synthesis, growth orientations and theoretical modelling

Morphological diversity of AlN nano- and microstructures: synthesis, growth orientations and theoretical modelling

Detection of a carcinoembryonic antigen using aptamer-modified film bulk acoustic resonators

Influence of Substrate Temperature on Structural Properties and Deposition Rate of AlN Thin Film Deposited by Reactive Magnetron Sputtering

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