A polyfunctional organic-inorganic hybrid monomer, methyl-tri(phenylethynyl)silane (MTPES) could be thermally polymerized by a free radical mechanism to a highly crosslinked structure of interest as a high temperature composite matrix resin. The structural changes during thermal cure process were characterized by fourier transform infrared spectrum and 13 C-CP-MAS-NMR spectrum. The disappearance of secondary acetylene stretching band at 2166 cm À1 was used successfully to monitor cure reaction accompanied with the formation of cis-polyene structure at 1600 and 754 cm À1 . The possible cure mechanism of MTPES was also proposed. The pyrolysis of cured MTPES under a stream of argon to 1450 C gave a ceramic in high yield (81%). Thermal conversion of polymer to ceramic was studied by means of X-ray diffraction, Raman spectrum, and energy dispersive spectrometer analysis. The results showed that pyrolytic products were made up of b-SiC, graphite, and glassy carbon. V