Synthesis and properties of YBa2Cu3O7 thin films grown in situ by 90° off-axis single magnetron sputtering

Eom, C. B.; Sun, Jian; Lairson, B. M.; Streiffer, S. K.; Marshall, A. F.; Yamamoto, Kiyoshi; Anlage, Steven M.; Bravman, J. C.; Geballe, T. H.; Laderman, S. S.; Taber, R. C.; Jacowitz, R. D.

doi:10.1016/0921-4534(90)90153-6

Cited by 236 publications

(35 citation statements)

References 61 publications

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“…The samples used in this study are epitaxial, c-axis oriented PbTiO 3 thin films grown on conducting (001) NbSrTiO 3 substrates using off-axis radio-frequency magnetron sputtering [24,25]. Topographic measurements using atomic force microscopy (AFM) showed that these films are essentially atomically smooth, with a rootmean-square roughness between 2 and 6Å over a 10 ×10 µm 2 area.…”

Section: A Experimental Detailsmentioning

confidence: 99%

Direct evidence for ferroelectric polar distortion in ultrathin lead titanate perovskite films

et al. 2006

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X-ray photoelectron diffraction is used to directly probe the intra-cell polar atomic distortion and tetragonality associated with ferroelectricity in ultrathin epitaxial PbTiO3 films. Our measurements, combined with ab-initio calculations, unambiguously demonstrate non-centro-symmetry in films a few unit cells thick, imply that films as thin as 3 unit cells still preserve a ferroelectric polar distortion, and also show that there is no thick paraelectric dead layer at the surface.

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Section: A Experimental Detailsmentioning

confidence: 99%

Direct evidence for ferroelectric polar distortion in ultrathin lead titanate perovskite films

et al. 2006

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“…With each wave of interest in a particular class of complex oxide materials, a route to high-quality oxide films through sputtering has usually been found, and the resulting films have been important enablers of scientific progress. Some examples include high-temperature superconductor thin films (Eom et al, 1989(Eom et al, , 1990 and superlattices (Triscone et al, 1990;Triscone, Karkut, Antognazza, Brunner, & Fischer, 1989), ferroelectricity in ultrathin perovskite titanate ferroelectrics Lichtensteiger, Triscone, Junquera, & Ghosez, 2005;Pertsev et al, 2003;Tybell, Ahn, & Triscone, 1999), multiferroic behavior in BiFeO 3 (Das et al, 2006), and metaleinsulator transitions in nickelate materials (Scherwitzl et al, 2010, 2011, Scherwitzl, Zubko, Lichtensteiger, & Triscone, 2009.…”

Section: Introductionmentioning

confidence: 99%

Sputtering techniques for epitaxial growth of complex oxides

Dawber

2015

Epitaxial Growth of Complex Metal Oxides

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“…Although, among the high-T c superconductors, YBa 2 Cu 3 O 7-δ is an easier materials for making in situ and ex situ thin films [1], the Bi 2 Sr 2 Ca n-1 Cu n O x system is more challenging and interesting one.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of BSCCO thin films using sputtering technique

Salamati

Kameli

Akhavan

2004

phys. stat. sol. (c)

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Investigation of BSCCO 2223 phase formation in superconducting thin films of Bi-based cuprates deposited on MgO substrate is reported. A series of films were made by in situ dc-magnetron sputtering method and another series were made by ex situ rf-magnetron sputtering technique. Same target have been used in both technique. In the case of the ex situ method, the films were annealed for different period of time at 800 °C, and in the case of in situ method, the films were deposited at different temperature substrate. The influence of annealing time and the temperature of the substrate on the quality and the phase formation for ex situ and in situ method have studied, respectively. The results of our studies show, although the samples prepared by in situ method have a better mechanical and superconductivity properties, the postannealed ex situ prepared samples have a superb structural and superconductivity properties.

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Synthesis and properties of YBa2Cu3O7 thin films grown in situ by 90° off-axis single magnetron sputtering

Cited by 236 publications

References 61 publications

Direct evidence for ferroelectric polar distortion in ultrathin lead titanate perovskite films

Direct evidence for ferroelectric polar distortion in ultrathin lead titanate perovskite films

Sputtering techniques for epitaxial growth of complex oxides

Fabrication of BSCCO thin films using sputtering technique

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