Synthesis and microstructural characterization of nanoscale multilayer TiAlN/TaN coatings deposited by DC magnetron sputtering

Contreras, Elbert; Bejarano, Gilberto; Botero, Maryory Astrid Gómez

doi:10.1007/s00170-018-2972-z

Cited by 10 publications

(4 citation statements)

References 29 publications

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“…Many research groups around the world have worked on this topic, and many papers have been published that review and evaluate the recent progress in this area [127,133,155,[158][159][160]. Among the most recent and interesting multilayer solutions for protective coatings there are TiN/TiAlN [161,162], TiAlN/TaN [163], Ti(Al)N/Cr(Al)N [121], (TiAlSiY)N/MoN [164], CrN/AlSiN [165], AlCrN/TiAlTaN [166], TiSiC/NiC [167], TiN/MoN [168,169], TiN/WN [170], TiN/ZrN [171], Zr/ZrN [172], Ta/TaN [173], CrN/MoN [174][175][176], (TiZrNbHfTa)N/WN [177], and multilayer hard/soft DLC coatings [178]. In particular, the following multi-layered coatings were also deposited on cemented carbide substrates or machining tool inserts, including WC-Co-based inserts, for mechanical tests in laboratories or for industrial tests: TiN/TiAlN [162], TiAlN/TiSiN [179], CrAlSiN/TiVN [180], AlCrN/TiVN [181], TiVN/TiSiN [182], CrN/CrCN [183], AlTiCrSiYN/AlTiCrN [184] TiCrAlN/TiCrAlSiYN [185].…”

Section: Multi-layered and Graded Coatingsmentioning

confidence: 99%

The Critical Raw Materials in Cutting Tools for Machining Applications: A Review

et al. 2020

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A variety of cutting tool materials are used for the contact mode mechanical machining of components under extreme conditions of stress, temperature and/or corrosion, including operations such as drilling, milling turning and so on. These demanding conditions impose a seriously high strain rate (an order of magnitude higher than forming), and this limits the useful life of cutting tools, especially single-point cutting tools. Tungsten carbide is the most popularly used cutting tool material, and unfortunately its main ingredients of W and Co are at high risk in terms of material supply and are listed among critical raw materials (CRMs) for EU, for which sustainable use should be addressed. This paper highlights the evolution and the trend of use of CRMs) in cutting tools for mechanical machining through a timely review. The focus of this review and its motivation was driven by the four following themes: (i) the discussion of newly emerging hybrid machining processes offering performance enhancements and longevity in terms of tool life (laser and cryogenic incorporation); (ii) the development and synthesis of new CRM substitutes to minimise the use of tungsten; (iii) the improvement of the recycling of worn tools; and (iv) the accelerated use of modelling and simulation to design long-lasting tools in the Industry-4.0 framework, circular economy and cyber secure manufacturing. It may be noted that the scope of this paper is not to represent a completely exhaustive document concerning cutting tools for mechanical processing, but to raise awareness and pave the way for innovative thinking on the use of critical materials in mechanical processing tools with the aim of developing smart, timely control strategies and mitigation measures to suppress the use of CRMs.

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Section: Multi-layered and Graded Coatingsmentioning

confidence: 99%

The Critical Raw Materials in Cutting Tools for Machining Applications: A Review

et al. 2020

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“…They should include not only unchanged microstructure, surface roughness, or thickness, but should also give true information about the material composition. Nowadays, it is possible to characterize a single film included in the multilayer structure with thicknesses of at least tens of nanometers [36]. Multilayer coatings (used as optical filters), which are a stack of high and low refractive index layers, have thicknesses of individual layers often <10 nm.…”

Section: Introductionmentioning

confidence: 99%

“…It should be noted that in many works (e.g., [36]) dedicated to SEM studies of thin film materials, especially those prepared by PVD or CVD methods, the methodology for preparation techniques for accurate microscopic visualization is not given or has a residual description. This causes difficulties in the proper interpretation and characterization.…”

Section: Introductionmentioning

confidence: 99%

Improved Methodology of Cross-Sectional SEM Analysis of Thin-Film Multilayers Prepared by Magnetron Sputtering

et al. 2023

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In this work, an improved methodology of cross-sectional scanning electron microscopy (SEM) analysis of thin-film Ti/V/Ti multilayers was described. Multilayers with various thicknesses of the vanadium middle layer were prepared by magnetron sputtering. The differences in cross sections made by standard fracture, focused ion beam (FIB)/Ga, and plasma focused ion beam (PFIB)/Xe have been compared. For microscopic characterization, the Helios NanoLab 600i microscope and the Helios G4 CXe with the Quanta XFlash 630 energy dispersive spectroscopy detector from Bruker were used. The innovative multi-threaded approach to the SEM preparation itself, which allows us to retain information about the actual microstructure and ensure high material contrast even for elements with similar atomic numbers was proposed. The fracture technique was the most noninvasive for microstructure, whereas FIB/PFIB results in better material contrast (even than EDS). There were only subtle differences in cross sections made by FIB-Ga and PFIB-Xe, but the decrease in local amorphization or slightly better contrast was in favor of Xe plasma. It was found that reliable information about the properties of modern nanomaterials, especially multilayers, can be obtained by analyzing a two-part SEM image, where the first one is a fracture, while the second is a PFIB cross section.

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“…TaN multilayers with alternating amorphous/crystalline layers have an critical load (L c2 ) approximately 31.6 N and superior corrosion resistance [18]. TiAlN/TaN multilayer films show preferential growth direction of (111) plane and microstructure of columnar growth [19]. Many studies have shown that Mo, V and other elements of Magné li phase structure oxides, such as Me n O 2n-1 , Me n O 3n-1 , and Me n O 3n-2 , which have thermally stable and easily sheared layers [20][21][22].…”

Section: Introductionmentioning

confidence: 99%

Microstructures and Properties of TiSiN/TaVN Nanomultilayers with Various V Contents

Yan

et al. 2023

J. Phys.: Conf. Ser.

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The purpose of this study was to optimize V content of TiSiN/TaVN nanomultilayers. TiSiN/TaVN nanomultilayers with various V contents were deposited on 304 stainless steels and Si wafers. The structures and properties of TiSiN/TaVN nanomultilayers were analyzed and characterized. The results show that TiSiN/TaVN nanomultilayers exhibit the face-centered cubic (FCC) structure and preferred orientation on the (111) and (200) planes. With the increasing of V contents, the diffraction peaks of TiSiN/TaVN nanomultilayers were shifted to larger angles. Paralleling to the growth direction of TiSiN/TaVN nanomultilayers, an alternating stress fields are generated to enhance their strength. The hardness and elastic modulus of the nanomultilayers firstly increases and then decreases and friction coefficient firstly decreases and then increases with increasing of V contents. TiSiN/TaVN nanomultilayer with 15 at.% V content indicates the maximum hardness of 27.23GPa, the maximum elastic modulus of 280.96GPa and the highest resistance against plastic deformation. TiSiN/TaVN nanomultilayer with 15 at.% V content has minimum friction coefficient of 0.16 because Magnéli phase oxide V2O5 is formed during the reciprocating sliding friction process and H3/E2 of TiSiN/TaVN nanomultilayer with 15at.% V content is highest.

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Synthesis and microstructural characterization of nanoscale multilayer TiAlN/TaN coatings deposited by DC magnetron sputtering

Cited by 10 publications

References 29 publications

The Critical Raw Materials in Cutting Tools for Machining Applications: A Review

The Critical Raw Materials in Cutting Tools for Machining Applications: A Review

Improved Methodology of Cross-Sectional SEM Analysis of Thin-Film Multilayers Prepared by Magnetron Sputtering

Microstructures and Properties of TiSiN/TaVN Nanomultilayers with Various V Contents

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