Synthesis and characterization of volatile, thermally stable bis(1,1,1,5,5,5-hexafluoropentane-2,4-dionato)barium-, -strontium- and -calcium · polyether complexes, suitable as precursors in chemical vapour deposition

Timmer, K.; Spee, Karel; Mackor, A.; Meinema, H.A.; Spek, Anthony L.; Sluis, P. van der

doi:10.1016/s0020-1693(00)80239-x

Cited by 77 publications

(31 citation statements)

References 23 publications

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“…As might be expected, a significant reduction of melting points of complexes I and II, as compared to analogue complexes with the hfa-ligand, has been observed: from 150 8C down to 90 8C for compound III, [26] and from 140 o C down to 82 8C for [Sr(hfa) 2 (tetraglyme)]. [26] Note that the equimolar mixture of complexes I and II melts at nearly the same temperature as complex II.…”

Section: Synthesis and Characterization Of New Barium And Strontium Pmentioning

confidence: 54%

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Novel Low Melting Point Barium and Strontium Precursors for the MOCVD Growth of Barium‐Strontium‐Titanate Films

Kuzmina¹,

Малкерова²,

Alikhanyan³

et al. 2009

Chemical Vapor Deposition

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Novel barium and strontium precursors, belonging to the family of volatile complexes of the alkaline earth element (AEE) fluorinated b-diketonates with polyglymes, [M(dfhd) 2 (tetraglyme)] [Hdfnd ¼ 1,1,1,2,2,6,6,7,7,7-dekafluoro-heptane-3,5-dione, M ¼ Ba (I), Sr (II)], are synthesized and tested with an aim to use them for metal-organic (MO)CVD of Ba x Sr 1-x TiO 3 (BST) thin films. The thermal behavior and composition of vapor phases for compounds I and II are studied by thermal analysis and mass spectrometry (MS). Considerable reduction of the melting point (down to 80-90 8C) for both compounds I and II, as compared to known volatile complexes, is achieved. By means of the developed precursors, epitaxial BST films (x ¼ 0.5) are grown on SrTiO 3 substrates by using the modified MOCVD facility. The quality of the grown films is examined by high-resolution (HR) X-ray diffraction (XRD) and high-resolution (HR) scanning electron microscopy (SEM).

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Section: Synthesis and Characterization Of New Barium And Strontium Pmentioning

confidence: 54%

“…[26] Note that the equimolar mixture of complexes I and II melts at nearly the same temperature as complex II.…”

Section: Synthesis and Characterization Of New Barium And Strontium Pmentioning

confidence: 99%

Novel Low Melting Point Barium and Strontium Precursors for the MOCVD Growth of Barium‐Strontium‐Titanate Films

Kuzmina¹,

Малкерова²,

Alikhanyan³

et al. 2009

Chemical Vapor Deposition

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“…The spectra show fragment peaks due to fragmentation of both the hfa and polyether ligands. In addition, there is evidence of the characteristic fluorine-transfer process, already observed in the spectra of the analogous alkaline-earth [18,21] and lanthanide (La, Gd, Eu) adducts. [2,4,6] The fluorine-transfer process preludes a fluoride phase formation that could contaminate the deposited films, unless appropriate conditions are used.…”

Section: Mass Spectramentioning

confidence: 67%

Yttrium β‐Diketonate Glyme MOCVD Precursors: Effects of the Polyether Length on Stabilities, Mass Transport Properties and Coordination Spheres

et al. 2004

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“…10 The required properties for MOCVD applications have been found in several alkaline-earth β-diketonate complexes whose ligation environments are saturated with ancillary glyme ligands. [4][5][6][7][8][9] In particular, the successful combination of both ligands has resulted in highly volatile and thermally stable complexes where the glyme ligand precludes either water coordination or oligomerization, which often occurs with simple β-diketonates. Similarly, the glyme co-ordination to lanthanide β-diketonate complexes yielded thermally stable and volatile lanthanide precursors.…”

Section: Introductionmentioning

confidence: 99%

Synthesis, crystal structure and mass transport properties of novel thallium ion precursors for MOCVD applications

et al. 2003

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The reaction of Tl 2 CO 3 with 1,1,1,5,5,5-hexafluoro-2,4-pentanedione (Hhfa) and diglyme {CH 3 O(CH 2 CH 2 O) 2 CH 3 } or tetraglyme {CH 3 O(CH 2 CH 2 O) 4 CH 3 } in dichloromethane yields the anhydrous, thermally and air stable, volatile Tl(hfa)ؒdiglyme and Tl(hfa)ؒtetraglyme adducts. They have been characterized by single crystal X-ray diffraction, elemental analysis, 1 H and 13 C NMR, IR and mass spectroscopy. Thermal and mass-transport properties have been investigated using thermogravimetric and differential scanning calorimetric measurements. There is evidence that both precursors are very low melting and volatile, and can be used as liquid Tl sources. Both adducts have been successfully applied to metal-organic chemical vapor deposition of thallium containing films.

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Synthesis and characterization of volatile, thermally stable bis(1,1,1,5,5,5-hexafluoropentane-2,4-dionato)barium-, -strontium- and -calcium · polyether complexes, suitable as precursors in chemical vapour deposition

Cited by 77 publications

References 23 publications

Novel Low Melting Point Barium and Strontium Precursors for the MOCVD Growth of Barium‐Strontium‐Titanate Films

Novel Low Melting Point Barium and Strontium Precursors for the MOCVD Growth of Barium‐Strontium‐Titanate Films

Yttrium β‐Diketonate Glyme MOCVD Precursors: Effects of the Polyether Length on Stabilities, Mass Transport Properties and Coordination Spheres

Synthesis, crystal structure and mass transport properties of novel thallium ion precursors for MOCVD applications

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