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The reaction of Tl 2 CO 3 with 1,1,1,5,5,5-hexafluoro-2,4-pentanedione (Hhfa) and diglyme {CH 3 O(CH 2 CH 2 O) 2 CH 3 } or tetraglyme {CH 3 O(CH 2 CH 2 O) 4 CH 3 } in dichloromethane yields the anhydrous, thermally and air stable, volatile Tl(hfa)ؒdiglyme and Tl(hfa)ؒtetraglyme adducts. They have been characterized by single crystal X-ray diffraction, elemental analysis, 1 H and 13 C NMR, IR and mass spectroscopy. Thermal and mass-transport properties have been investigated using thermogravimetric and differential scanning calorimetric measurements. There is evidence that both precursors are very low melting and volatile, and can be used as liquid Tl sources. Both adducts have been successfully applied to metal-organic chemical vapor deposition of thallium containing films.

Functional devices such as sensors, actuators or micro-electromechanical systems (MEMS) are obtained through a large variety of microfabrication processes, many of whom affect the structure and microstructure of materials because of the introduction of stress, strain, crystalline defects and volume-cracks. The materials degradation originated by these effects may translate into a lack of performance and reliability of the final devices. Indeed, in the frame of the microfabrication industry, controlling the structure of materials at the micrometer and nanometer scale represents a fundamental objective toward the optimization of the microfabrication process itself and achievement of improved devices' performance and lifetime.