1991
DOI: 10.1002/prac.19913330418
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Synthesis and characterization of substituted 2‐diazo‐1 ‐oxo‐1,2‐dihydzonaphthalenes and their products of photolysis and thermolysis

Abstract: Several 2‐diazo‐1‐oxo‐1,2‐dihydronaphthalene{ (1, 2) have been synthesized by reaction of selected hydroxy compounds and 2‐diazo‐1‐oxo‐1,2‐dihydzonaphthalene‐5‐ and ‐4‐sulfonylchloride, respectively. Photolysis as well as thermolysis of 1 and 2 leads to final products, the nature of which depends on the position of substitution. So, reactions of 5‐substituted derivatives (1) yield the corresponding indene‐3‐carboxylic acids 3 and their esters 5, respectively. In contrast, reactions of 4‐substituted derivatives… Show more

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Cited by 10 publications
(9 citation statements)
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“…Good yields of indenecarboxylic acids 697 were obtained in aqueous acetic acid. [494] After irradiation of 696 in a novolac matrix at 77 K, both ketenes and ketene hydrates were detected by infrared spectroscopy. [495] Reaction of the intervening ketenes with hydroxyl groups of the novolac was modeled by decomposition of 696 in the presence of p-cresol to give 699.…”
Section: Diazoquinones (Quinonediazides) Photoresistsmentioning
confidence: 99%
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“…Good yields of indenecarboxylic acids 697 were obtained in aqueous acetic acid. [494] After irradiation of 696 in a novolac matrix at 77 K, both ketenes and ketene hydrates were detected by infrared spectroscopy. [495] Reaction of the intervening ketenes with hydroxyl groups of the novolac was modeled by decomposition of 696 in the presence of p-cresol to give 699.…”
Section: Diazoquinones (Quinonediazides) Photoresistsmentioning
confidence: 99%
“…[495] Reaction of the intervening ketenes with hydroxyl groups of the novolac was modeled by decomposition of 696 in the presence of p-cresol to give 699. [494] This undesired side-reaction is minimized by maintaining a sufficient concentration of water in the resist. Aqueous alkaline developers (pH 11.5Ϫ12.8) are used to dissolve the exposed areas of the resist where 696 was converted into 697 (positive photoresist).…”
Section: Diazoquinones (Quinonediazides) Photoresistsmentioning
confidence: 99%
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“…In combination with an acid-dependent crosslinking agent, aryl 2-diazonaphthalen-1-one-4-sulfonates provide negative photoresists (Scheme 59, top). 173,175 Other resists are available like, two-component resists bearing up to three diazo quinones linked in the same core 177 and a one-component system where the diazo quinone is directly linked to fragments of Novolac 178 (Scheme 59, below). The 2-diazo-1(2H)-naphthalenone has been recently explored as potential UV-phototriggered releasing agents.…”
Section: Scheme 55mentioning
confidence: 99%
“…The ring contraction and ketene hydrolysis provides 1H-indene-3-carboxylic acids 205, which displays a very distinct solubility in aqueous basic solutions compared with the parent diazo quinone 204 (Scheme 56). 173 The change in solubility in diazo quinones on irradiation allowed the exploration of these compounds as photoresists in the field of photolitography. 10 …”
Section: Resistsmentioning
confidence: 99%