Precursor polycarbosilane containing acetylenic and SiAH group (PCAS) has been successfully prepared by the reaction of dilithioacetylene with methyl dichlorosilane, and characterized by gel permeation chromatography, Fourier transform infrared spectroscopy, 1 H-NMR, 13 C-NMR, and 29 Si-NMR. Thermogravimetric analysis curve in nitrogen showed the temperature of 5 wt % weight losses (T d5 ) was 613 C, while the ceramic yield of PCAS was 88% at 1000 C. Pyrolysis behavior and structure evolution of the cured PCAS were studied by means of X-ray diffraction, Raman, scanning electron microscope-energy dispersive X-ray spectrometer, transmission electron microscope (selected area electron diffraction and high resolution transmission electron microscope), and elemental analysis. The polymer to ceramic conversion was completed at 1600 C and the results revealed that the ceramic consisted of b-SiC and a-SiC. The composition of the ceramic was near-stoichiometric with molar ratio of Si/C (1.02 : 1) except rare and localized free carbon inclusions. The SiC ceramics exhibited high thermo-oxidation resistance at elevated temperatures in air atmosphere.