Synthesis and characterization of nanostructured ZnO multilayer grown by DC magnetron sputtering

Shirazi, Marzieh; Hosseinnejad, Mohammad Taghi; Zendehnam, Akbar; Ghoranneviss, M.; Etaati, G. R.

doi:10.1016/j.jallcom.2014.03.029

Cited by 21 publications

(6 citation statements)

References 43 publications

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“…Transparent conductive oxides (TCO) are widely used in various applications in many optoelectronic devices, such as solar cells, LCDs, optical waveguide, surface acoustic wave (SAW) devices, blue or ultra-violet (UV) LEDs, laser diodes (LD), light emitting diodes, gas sensor and different other devices [1][2][3][4][5].…”

Section: Introductionmentioning

confidence: 99%

Effect of substrate temperature on structural, morphological and optical properties of deposited Al/ZnO films

et al. 2014

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Al-doped ZnO (Al/ZnO) thin film is a promising alternative to an ITO electrode in solar cell applications due to its low price, non-toxicity and other promising properties. In this paper, Al/ZnO thin films at different substrate temperatures were deposited on glass substrates as transparent conducting (TCO) films by DC magnetron sputtering. The effect of substrate temperature on the structural, morphological and optical properties of Al/ZnO films was investigated. X-ray diffraction (XRD) analysis suggests that crystal structure characteristics of synthesized thin films depend on the substrate temperature. The structure growth and variation in surface roughness with increasing substrate temperature are revealed by scanning electron microscope (SEM) micrographs and atomic force microscopy (AFM) analyses. Thicknesses of the deposited films were also examined by surface profiler. Moreover, obtained results from optical transmission patterns revealed that with the increasing substrate temperature, optical transmittance decreases.

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Section: Introductionmentioning

confidence: 99%

Effect of substrate temperature on structural, morphological and optical properties of deposited Al/ZnO films

et al. 2014

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“…Apart from sol-gel [ 7 , 8 , 9 ], sol-gel combined with spin coating [ 10 , 11 ], sol-gel combined with dip coating [ 12 , 13 ], and low temperature electrochemical deposition [ 14 , 15 ], direct current (DC) magnetron sputtering can be successfully used to obtain nanoporous ZnO thin films [ 16 , 17 , 18 , 19 ] having, among others, improved gas sensor characteristics [ 20 , 21 ], as was reviewed by Kumar et al [ 22 ].…”

Section: Introductionmentioning

confidence: 99%

Surface Properties of Nanostructured, Porous ZnO Thin Films Prepared by Direct Current Reactive Magnetron Sputtering

et al. 2018

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In this paper, the results of detailed X-ray photoelectron spectroscopy (XPS) studies combined with atomic force microscopy (AFM) investigation concerning the local surface chemistry and morphology of nanostructured ZnO thin films are presented. They have been deposited by direct current (DC) reactive magnetron sputtering under variable absolute Ar/O2 flows (in sccm): 3:0.3; 8:0.8; 10:1; 15:1.5; 20:2, and 30:3, respectively. The XPS studies allowed us to obtain the information on: (1) the relative concentrations of main elements related to their surface nonstoichiometry; (2) the existence of undesired C surface contaminations; and (3) the various forms of surface bondings. It was found that only for the nanostructured ZnO thin films, deposited under extremely different conditions, i.e., for Ar/O2 flow ratio equal to 3:0.3 and 30:3 (in sccm), respectively, an evident and the most pronounced difference had been observed. The same was for the case of AFM experiments. What is crucial, our experiments allowed us to find the correlation mainly between the lowest level of C contaminations and the local surface morphology of nanostructured ZnO thin films obtained at the highest Ar/O2 ratio (30:3), for which the densely packaged (agglomerated) nanograins were observed, yielding a smaller surface area for undesired C adsorption. The obtained information can help in understanding the reason of still rather poor gas sensor characteristics of ZnO based nanostructures including the undesired ageing effect, being of a serious barrier for their potential application in the development of novel gas sensor devices.

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“…Zinc oxide (ZnO) is one of the technological semiconductor materials due to its interesting properties such as wide optical band gap (3.37 eV) at room temperature, high transparency, large exciton energy (60 meV), high chemical stability, and wide range of resistivity which can extend from 10 -4 to 10 2 X cm [1][2][3]. ZnO-based structures have been applied in a variety of fields such as light emitting diodes, photo diodes [4], solar cells [5,6], gas sensor [7], surface acoustic wave devices [8], field effect transistor [9] and piezoelectric devices [10].…”

Section: Introductionmentioning

confidence: 99%

Influence of doping behavior of Al on nanostructure, morphology and optoelectronic properties of Al Doped ZnO thin film grown on FTO substrate

Shirazi

Dariani

Toroghinejad

2016

J Mater Sci: Mater Electron

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Al doped ZnO nanostructures deposited on FTO glass substrate by spray pyrolysis method with different Al doping levels (0-5 wt%). The structural, morphological, optical and electrical properties of fabricated samples were analyzed using X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), atomic force microscopy (AFM), photoluminescence (PL), four point probe, and UV-Vis spectroscopy. The results obtained from XRD analysis indicated that the growth preferred orientation of the ZnO thin films strongly depend on Al doping value. Also the crystalline plane distance and grain size decreased while free electron density and energy band gap enhanced as the Al doping value increased. PL analysis revealed the Near Band emission in PL spectra shifts to shorter wavelengths and Fermi surface shifts to conduction band with increasing the Al content. Electrical measurements illustrated that the resistivity reduces with doping Al into ZnO and reaches to minimum value for 3 % Al doped sample. Also the surface morphology and surface roughness of samples deposited by various Al doping values studied by FESEM and AFM analyzes.

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Synthesis and characterization of nanostructured ZnO multilayer grown by DC magnetron sputtering

Cited by 21 publications

References 43 publications

Effect of substrate temperature on structural, morphological and optical properties of deposited Al/ZnO films

Effect of substrate temperature on structural, morphological and optical properties of deposited Al/ZnO films

Surface Properties of Nanostructured, Porous ZnO Thin Films Prepared by Direct Current Reactive Magnetron Sputtering

Influence of doping behavior of Al on nanostructure, morphology and optoelectronic properties of Al Doped ZnO thin film grown on FTO substrate

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