2020
DOI: 10.56053/4.1.29
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Synthesis and Characterization of GaN Nanocrystalline Thin Films on Various Substrates by RF Magnetron Sputtering

Abstract: Gallium nitride (GaN) nanocrystalline (NC) thin films (TH) were deposited on different surfaces of material as substrates; quartz, glass as well as fluorine-doped tin oxide (FTO) using radio frequency (RF) reactive magnetron sputtering method. The effects of substrate type on structural and morphological properties of GaN-NCTH were studied. X-ray diffraction analyses and field-emission scanning electron microscopy (FESEM) images showed that the GaN particles have covered all surfaces of the substrates with a s… Show more

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Cited by 6 publications
(1 citation statement)
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“…III-V nitrides gallium nitride (GaN), aluminum nitride (AlN), and indium nitride (InN) and their alloys are semiconductor particularly attractive for applications in optoelectronics and microelectronics: Leds, Laser, solar cells, Schottky diodes, Hemts, SSDs [1][2][3][4][5]. Today the Synthesis of GaN is perfectly mastered [6][7][8][9][10][11].…”
Section: Introductionmentioning
confidence: 99%
“…III-V nitrides gallium nitride (GaN), aluminum nitride (AlN), and indium nitride (InN) and their alloys are semiconductor particularly attractive for applications in optoelectronics and microelectronics: Leds, Laser, solar cells, Schottky diodes, Hemts, SSDs [1][2][3][4][5]. Today the Synthesis of GaN is perfectly mastered [6][7][8][9][10][11].…”
Section: Introductionmentioning
confidence: 99%