Synthesis and characterization of fluorinated β-ketoiminate and imino-alcoholate Pd complexes: precursors for palladium chemical vapor deposition

Metal–Organic Derivatives with Fluorinated Ligands as Precursors for Inorganic Nanomaterials

“…On the other hand, the dimeric compound [Me 2 In{OC(CF 3 ) 2 CH 2 NHCH 2 CH 2 -OMe}] 2 contains a centrosymmetric, four-membered In 2 O 2 ring, where each indium metal atom adopts a distorted trigonal bipyramidal geometry with two methyl groups being in equatorial positions ( Figure 6). 40 A number of other metal complexes (Ti, 70 Zr, 70 Hf, 70 Ru, 39 Pd, 38 Ir, 215 and Cu 37,43 ) based on fluorinated amino-and imino-alkoxide ligands have also been reported. X-ray diffraction studies revealed a monomeric structure in all cases, with the anticipated coordination according to the type of ligand framework.…”

“…Three of the seven oxo groups centering the octahedron act as μ 4 -bridges to which Bi (hfac) x (x = 3 or 4) arms are attached. The second nearly spherical cluster [Bi 38 O 45 (hfac) 24 ], which is among the largest known homometallic bismuth oxido clusters, has a fascinating giant [Bi 38 O 45 ] 24+ core with 24 β-diketonate groups located on its surface (Figure 25). Within the bismuth oxido core, a central Bi 6 unit can be identified whose metal atoms are connected only to oxo centers.…”

“…38 Deposition of a Pd thin film was also possible with these precursors using a reactive O 2 carrier gas. The composition and texture of the thin films could be engineered by varying the CVD conditions.…”

Nanostructured Fe2O3 Processing via Water‐Assisted ALD and Low‐Temperature CVD from a Versatile Iron Ketoiminate Precursor

“…The resulting metal complexes could be promising candidates which potentially fulfill the criteria of volatility, suitable reactivity and sufficient thermal stability ( Scheme ) for atomic layer deposition and sufficient temperature window between volatilization and decomposition for low‐temperature CVD applications. Metal ketoiminates have been considered and applied as precursors for the CVD of metal oxides and nitrides of various transition metals, e.g., Ru, Ta, Nb, Zn, Pd, Cu, Ni, Ir, Ti . So far, none of these compounds have been tested for ALD applications, to the best of our knowledge.…”

Bis(β-diketonato)- and allyl-(β-diketonato)-palladium(ii) complexes: synthesis, characterization and MOCVD application

“…17 In order to improve the CVD performance of these complexes, it has been shown that the combination of the two ligands allyl and b-diketonate is a promising approach to synthesize tailormade precursors for Pd deposition. [22][23][24] In the early nineties, Yuan and Puddephatt, for example, reported on the synthesis of [Pd(h 3 -allyl)(acac)] (4), [Pd(h 3 -2-Me-allyl)(acac)] (5), and [Pd(h 3 -2-Me-allyl)(hfac)] (6) (hfac ¼ hexauoroacetylacetonate) and their application in the CVD process. 24 While, 4 still suffered from its poor stability, the substitution of the h 3 -allyl ligand in the 2-position by a methyl group, as characteristic for 5 and 6, resulted in more thermal stability.…”