Synthesis and characterization of Au–Ta nanocomposites for nanomechanical cantilever devices

Nelson-Fitzpatrick, Nathan; Ophus, Colin; Luber, Erik J.; Gervais, Luc; Lee, Zonghoon; Radmilović, V.; Mitlin, David; Evoy, Stéphane

doi:10.1088/0957-4484/18/35/355303

Cited by 14 publications

(10 citation statements)

References 21 publications

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“…For example, a similar microstructure composed of the base element less prone to significant oxidation than Al should offer improved detection sensitivity in parallel with all the advantages of an electrically conductive platform. To this end we have recently developed Au and Ni-based devices 16,17 with improved Q values over Al-Mo.…”

Section: ͑1͒mentioning

confidence: 99%

Resonance properties and microstructure of ultracompliant metallic nanoelectromechanical systems resonators synthesized from Al–32at.%Mo amorphous-nanocrystalline metallic composites

Ophus

Fitzpatrick

Lee

et al. 2008

Applied Physics Letters

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This study details the resonance properties of 20nm thick nanoelectromechanical system scale cantilevers fabricated from a metallic Al–32at.%Mo nanocomposite. The advantage of the Al–32at.%Mo alloy is that its strength and near-atomic surface smoothness enable fabrication of single-anchored metallic cantilevers with extreme length-to-thickness ratios, as high as 400:1. This yields uniquely compliant structures with exquisite force sensitivity. For example, an 8μm long, 20nm thick Al–32at.%Mo device has a spring constant of K≅280μN∕m. We show through transmission electron microscope analysis and continuum modeling that the relevant damping mechanisms are related to the device microstructure.

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Section: ͑1͒mentioning

confidence: 99%

Resonance properties and microstructure of ultracompliant metallic nanoelectromechanical systems resonators synthesized from Al–32at.%Mo amorphous-nanocrystalline metallic composites

Ophus

Fitzpatrick

Lee

et al. 2008

Applied Physics Letters

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“…22 Alternatively, novel cosputtered metal nanocomposites optimized for the fabrication of micromechanical devices have recently been reported. [23][24][25][26] These nanocomposites feature grain size as low as a few nanometers as well as residual stresses substantially lower than pure metals. 1 These materials also offer intrinsic tunability of their affinity to target chemisorbed species through control of their atomic composition.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and characterization of aluminum-molybdenum nanocomposite membranes

Hurk

Nelson-Fitzpatrick²,

Evoy

2014

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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Nanomembranes with thicknesses less than 100 nm and high width-to-thickness ratios are of interest in sensing, energy storage, actuator, and optical applications. The fabrication of conductive nanocomposite aluminum-molybdenum (AlMo) membranes as thin as 28 nm and high fracture strength is reported. The density, Poisson's ratio, and Young's modulus of the membranes were determined to be ρ = 5000 ± 550 kg/m3, σ = 0.33 ± 0.05, and E = 127 ± 21 GPa, respectively. The intrinsic stress of the membranes was determined by bulge testing, finite element analysis (FEA), and classical mechanics. The resonance frequencies of the membranes were assessed using FEA and measured by optical interferometry. The fracture strength of the AlMo membranes was 1.89 ± 0.45 GPa, and the average resistivity was ρ = 5810 ± 44 μΩ cm. The high fracture strength and low resistivity of such AlMo membranes makes them attractive in the design of microdevices requiring ultrathin yet electrically conductive membranes.

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“…We recently proposed the use of co-sputtered metal nanocomposites for the fabrication of micromechanical devices. These nanocomposites offer grain size as low as a few nanometers as well as a low residual stress (Nelson-Fitzpatrick et al 2007). These alloys offer the possibility of an extremely stress sensitive device due to the relatively low Young's modulus of Au and the thinness of the Au nanocomposite alloy layer that can be successfully released.…”

Section: Introductionmentioning

confidence: 99%

Highly compliant static microcantilevers fabricated in gold nanocomposite materials

Nelson-Fitzpatrick

Evoy

2011

J. Micromech. Microeng.

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Static microcantilevers with superior stress sensitivity were produced out of a novel Au–Ta metal nanocomposite, and successfully employed for the detection of chemisorbed dodecanethiol. Au–Ta nanocomposite films of various compositions were first synthesized by co-sputtering in order to assess the chemisorption of alkanethiol molecules on their surfaces. Previous x-ray diffraction analysis showed that from 0–50% at. Ta, the films retain gold's FCC structure and ⟨1 1 1⟩ texture necessary for the formation of an alkanethiol self-assembled monolayer. Attachment of dodecanethiol molecules from vapor phase onto the surface of our Au–Ta films was then quantified using contact angle measurements and x-ray photoelectron spectroscopy. As suggested by the x-ray diffraction results, the incorporation of small amounts of tantalum (5% and 10% at. Ta films) had little adverse effect on the attachment of dodecanethiol. However, this ceased to be the case at 20% at. Ta and above. Static microcantilevers were then fabricated directly out of a 5% Au–Ta nanocomposite alloy by patterning the sputtered Au–Ta layer onto a silicon wafer using contact photolithography and releasing the cantilever with an SF6 reactive ion etch. Cantilevers 140 µm long, 20 µm wide, and 369 nm thick showed a spring constant of 10.5 mN m−1. The detection of chemisorbed dodecanethiol molecules was successfully demonstrated with these structures through the monitoring of static deflections.

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Synthesis and characterization of Au–Ta nanocomposites for nanomechanical cantilever devices

Cited by 14 publications

References 21 publications

Resonance properties and microstructure of ultracompliant metallic nanoelectromechanical systems resonators synthesized from Al–32at.%Mo amorphous-nanocrystalline metallic composites

Resonance properties and microstructure of ultracompliant metallic nanoelectromechanical systems resonators synthesized from Al–32at.%Mo amorphous-nanocrystalline metallic composites

Fabrication and characterization of aluminum-molybdenum nanocomposite membranes

Highly compliant static microcantilevers fabricated in gold nanocomposite materials

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