Synthesis and Characterization of a Nano (CdO)0.94:(In2O3) 0.06 / Si gas Sensor

Abstract

In this work, a (CdO)0.94:(In2O3)0.06 film was developed on a glass substrate using Q- switching pulse laser beam (Nd:YAG; wavelength 1064 nm). The quantitative elemental analysis of the (CdO)0.94:(In2O3)0.06 thin film was achieved using energy dispersive X- ray diffraction (EDX). The topological and morphological properties of the deposited thin film were investigated using atomic force microscope (AFM) and field emission scan electron microscopy (FESEM). The I-V characteristic and Hall effect of (CdO)0.94 :(In2O3)0.06 thin films were used to study the electrical properties. The gas sensor properties of the film prepared on n-Si were investigated for oxidization and reduction gases.