Synchrotron investigation of the multilayer nanoperiodical Al₂O₃/SiO/Al₂O₃/SiO…Si structure formation

Abstract

The results of a multilayered nanoperiodical structures (MNS; Al 2 O 3 /SiO/Al 2 O 3 /SiO. . .Si) investigation using X-ray absorption nearedge structure (XANES) spectroscopy technique are presented. XANES spectra were obtained using synchrotron radiation. Possible silicon nanocluster formations are shown on the surface layers of the MNS under high-temperature annealing. At the same time, possible aluminum silicate formation is shown. The phenomenon of absorption spectra intensity inversion is demonstrated in the results of the interaction between synchrotron radiation and MNS.

Energy band gaps and excited states in Si QD/SiO x /R y O z (R = Si, Al, Zr) suboxide superlattices

“…Samples were synthesized in the Lobachevsky State University of Nizhny Novgorod, Russia. All layers were obtained by electron-beam evaporation [3][4][5][6][7][8][9][10][11]: SiO x layers from SiO powder (grade XC) with an effusion tantalum source, SiO 2 layers from fused quartz (grade C5-1), Al 2 O 3 layers from polycrystalline corundum (Polycor VK-100-1), and ZrO 2 layers from the corresponding oxide. The substrate temperature during the evaporation process was maintained at 200 °C ± 10 °C.…”

“…Significant interest in the past decade has been devoted to the structure and luminescent properties of the multilayer nano-periodic systems (MNS) of the 'suboxide SiO x /oxide' type [3][4][5][6][7][8][9][10][11]. Such composites are used to form ordered layers (a superlattice) of silicon quantum dots (QDs) separated by oxide barriers.…”

“…MNS systems are convenient, since they can be obtained by standard planar processing procedures, presenting new opportunities for integrating emitters and photodetectors on a single chip. The morphology of the Si QDs and the mechanisms of growth and radiative recombination were extensively investigated in [4][5][6][7][8][9][10][11][12] by transmission electron microscopy (TEM), x-ray absorption near-edge structure (XANES), and photoluminescence (PL) methods with laser excitation.…”