2008
DOI: 10.1109/jsen.2008.918981
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Symmetrical PolyMUMPs-Based Piezoresistive Microcantilever Sensors With On-Chip Temperature Compensation for Microfluidics Applications

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Cited by 8 publications
(2 citation statements)
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“…The label-free transducer principles are typically based on a variety of responses, including increase of mass-induced mechanical deflection (cantilever) [78,79] shown in Fig. 8, mass spectrometry [80], mass-induced change of gold/silver surface light reflection surface plasmon resonance [81], electrical potential changes [82,83], change of the inner heat (calorimetry) [84], acoustic or surface acoustic wave detection [85], surface-enhanced Raman scattering [86], and piezoelectric or piezoresistive platforms [87,88], among others (Table 1). Label-free detection methods have been used primarily for in-depth characterization of biomolecule interactions.…”
Section: Detection Systems Of Sensorsmentioning
confidence: 99%
“…The label-free transducer principles are typically based on a variety of responses, including increase of mass-induced mechanical deflection (cantilever) [78,79] shown in Fig. 8, mass spectrometry [80], mass-induced change of gold/silver surface light reflection surface plasmon resonance [81], electrical potential changes [82,83], change of the inner heat (calorimetry) [84], acoustic or surface acoustic wave detection [85], surface-enhanced Raman scattering [86], and piezoelectric or piezoresistive platforms [87,88], among others (Table 1). Label-free detection methods have been used primarily for in-depth characterization of biomolecule interactions.…”
Section: Detection Systems Of Sensorsmentioning
confidence: 99%
“…Electrochemical transduction has so far dominated research activities on gas sensors, because its interface setup is more straightforward than other transduction methods. (Choopun et al, 2007;Lorwongtragool et al, 2011) Nevertheless, many research groups including us have been working on many transduction principles, i.e., optical (Uttiya et al, 2008) and gravimetric (Tuantranont et al, 2008), in parallel in order to take advantage of hybrid methodology that could dramatically enhance the performance of electronic nose. Due to the simplicity of the electronics involved, most commercial chemical gas sensors adopt electrical transduction technology in which the metal oxide semiconductors assume the most used sensor architecture according to their low-cost, high sensitivity and simplicity in function.…”
Section: Introductionmentioning
confidence: 99%