2005
DOI: 10.1016/j.sna.2005.03.035
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Symmetric toggle switch—a new type of rf MEMS switch for telecommunication applications: Design and fabrication

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Cited by 62 publications
(35 citation statements)
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“…Pull-in voltage is a specific voltage at which the stability of the equilibrium is lost. [28] The pull-in voltage (V pi ) occurs when the deflection z ¼ 2/3 g o and is calculated as follows:…”
Section: Top Electrodementioning
confidence: 99%
See 1 more Smart Citation
“…Pull-in voltage is a specific voltage at which the stability of the equilibrium is lost. [28] The pull-in voltage (V pi ) occurs when the deflection z ¼ 2/3 g o and is calculated as follows:…”
Section: Top Electrodementioning
confidence: 99%
“…The present electrostatic switch model neglects the electrostatic nonlinear bending condition since displacement of the electrode is relatively small. [27,28] Also, the displacement of the micro-projection is assumed to be uniform throughout its length, as its length is much shorter compared to the length of the top electrode. [28] Microheater As shown in Figure 1, the present device's design includes a microheater to heat the Ag 2 O þ Y þþþ coating to higher temperatures for CO 2 capture and release.…”
Section: Top Electrodementioning
confidence: 99%
“…RF-MEMS is becoming an attractive technology for the above cited purpose. Amongst the different devices, switches have gained higher attention because of the large number of advantages over their solid state counterparts such as low insertion loss, high isolation, less power consumption, high linearity, wide bandwidth and integration with electronics (Brown 1998;Tilmans et al 2003;Rebeiz 2003;Rangra 2005;Angira et al 2013. The switches are broadly classified as series metal to metal contact and shunt capacitive and can be used as a building block in many telecommunication systems, including multi-port switches (DiNardo et al 2006;Kang et al 2009;Bansal et al 2014), switch matrix (Fomani and Mansour 2009), phased array antenna (Armenta et al 2012), tunable filters (Peroulis et al 2000;Entesari and Rebeiz 2005;Guo and Jin 2011) and phase shifters (Rebeiz et al 2002;Dey and Koul 2012;Razeghi and Ganji 2013).…”
Section: Introductionmentioning
confidence: 99%
“…A number of structures have been reported in the literature for the capacitive switches having good RF performance in a single band, moderate pull-in voltage, but lags in multiband functionality (Rangra et al 2005;Fouladi and Mansour 2010;Bansal et al 2013;. The other approach is to combine series and shunt switches to realize multi-band devices.…”
Section: Introductionmentioning
confidence: 99%
“…Their rapid advancements offer many benefits to applications in microscale, especially in the biomedical field (Erismis et al 2010;Nisar et al 2008), microrobotics (Donald et al 2006) and telecommunication (Rangra et al 2005). Microactuators can be classified based on their actuating principles into electrostatic, electromagnetic, piezoelectric, thermal and shape-memory-alloy (SMA) actuators (Bell et al 2005).…”
mentioning
confidence: 99%