2012
DOI: 10.1063/1.4749809
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Switching dynamics and charge transport studies of resistive random access memory devices

Abstract: We report the switching dynamics and charge transport studies on Ru/HfO2/TiOx/Ru resistive random access memory devices in low resistance state (LRS), high resistance state (HRS), and virgin resistance state (VRS). The charge transport in LRS is governed by Ohmic conduction of electrons through local filamentary paths while it is governed by a combination of Frenkel-Poole emission and trap assisted tunneling process in HRS and VRS. The area of the filament in LRS is extracted and related to the compliance curr… Show more

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Cited by 37 publications
(31 citation statements)
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“…Besides this, microscopic models such as multi-phonon TAT (MTAT) model are often used. The TAT conduction modeling is found to be consistent with some experimental data based on HfOx [54][55][56], TaOx [57] and SiOx [58,59] as depicted in Table 5. Bersuker et al [54] analyzed the conduction mechanism in TiN/HfO2/TiN device by using the statistical multi-phonon trap-assisted tunneling (MTAT) model.…”
Section: Trap-assisted Tunneling (Tat)supporting
confidence: 69%
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“…Besides this, microscopic models such as multi-phonon TAT (MTAT) model are often used. The TAT conduction modeling is found to be consistent with some experimental data based on HfOx [54][55][56], TaOx [57] and SiOx [58,59] as depicted in Table 5. Bersuker et al [54] analyzed the conduction mechanism in TiN/HfO2/TiN device by using the statistical multi-phonon trap-assisted tunneling (MTAT) model.…”
Section: Trap-assisted Tunneling (Tat)supporting
confidence: 69%
“…Long et al [56] affirmed the role of Ohmic conduction during LRS in 6 nm thick HfO2-based device. However, the conduction in HRS is found to be governed by combination of both P-F emission and TAT process.…”
Section: Trap-assisted Tunneling (Tat)mentioning
confidence: 99%
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“…This is because to achieve multiple LRS values in RRAM devices, the compliance current needs to be carefully controlled. The LRS value of RRAM device is very sensitive to the compliance current used to set the device [14]. A lower compliance current leads to the formation of smaller dimension filaments resulting in a higher resistance in LRS while a higher compliance current leads to the formation of bigger filament resulting in a lower resistance in LRS of the device [14].…”
Section: Rram Power Analysismentioning
confidence: 99%
“…The LRS value of RRAM device is very sensitive to the compliance current used to set the device [14]. A lower compliance current leads to the formation of smaller dimension filaments resulting in a higher resistance in LRS while a higher compliance current leads to the formation of bigger filament resulting in a lower resistance in LRS of the device [14]. Different compliance currents can be achieved by connecting a transistor with RRAM device and applying an appropriate gate voltage to limit the maximum current through the RRAM device, shown in Fig.…”
Section: Rram Power Analysismentioning
confidence: 99%