Suspended Single‐Crystal Diamond Nanowires for High‐Performance Nanoelectromechanical Switches

Liao, Meiyong; Hishita, Shunichi; Watanabe, Eiichiro; Koizumi, Satoshi; Koide, Yasuo

doi:10.1002/adma.201003074

Cited by 110 publications

(92 citation statements)

References 29 publications

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“…Since SWCNTs possess remarkable electrical, thermal, mechanical, and optical properties, we can expect significant enhancement of physical properties in polymer nanostructures. Thus, this approach for 3D micro/nano-fabrication of SWCNT/polymer composites is promising for functional applications in fields such as micro-and nanoelectromechanical systems (MEMS/NEMS) [27,37].…”

Section: Introductionmentioning

confidence: 99%

3D microfabrication of single-wall carbon nanotube/polymer composites by two-photon polymerization lithography

Ushiba

Shoji

Masui

et al. 2013

Carbon

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Please cite this article as: Ushiba, S., Shoji, S., Masui, K., Kuray, P., Kono, J., Kawata, S., 3D microfabrication of single-wall carbon nanotube/polymer composites by two-photon polymerization lithography, Carbon (2013), doi: http://dx.doi.org/10. 1016/j.carbon.2013.03.020 This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain. AbstractWe present a method to develop single-wall carbon nanotube (SWCNT)/polymer composites into arbitrary three-dimensional micro/nano structures. Our approach, based on two-photon polymerization lithography, allows one to fabricate three-dimensional SWCNT/polymer composites with a minimum spatial resolution of a few hundreds nm. A near-infrared femtosecond pulsed laser beam was focused onto a SWCNT-dispersed photo resin, and the laser light solidified a nanometric volume of the resin. The focus spot was three-dimensionally scanned, resulting in the fabrication of arbitrary shapes of SWCNT/polymer composites.SWCNTs were uniformly distributed throughout the whole structures, even in a few hundreds nm thick nanowires. Furthermore, we also found an intriguing phenomenon that SWCNTs were self-aligned in polymer nanostructures, promising improvements in mechanical and electrical properties. Our method has great potential to open up a wide range of applications such as micro-and nanoelectromechanical systems, micro/nano actuators, sensors, and photonics devices based on CNTs. Main Text

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Section: Introductionmentioning

confidence: 99%

3D microfabrication of single-wall carbon nanotube/polymer composites by two-photon polymerization lithography

Ushiba

Shoji

Masui

et al. 2013

Carbon

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“…According to equation (6) . Figure 6a illustrates the predictions of xy R both including and neglecting surface effects in equation (4). For both cases, the values of xy R can be well described by a reciprocal function, which converges to one with increasing b.…”

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confidence: 92%

“…Substituting the two frequency values in Fig. 2b and using a classical flexural rigidity of 4 47 , 82.7 GPa by Chen et al 49 . The following discussion assumes the existence of two close resonant frequencies for the NW, which correspond to two different Young's moduli.…”

mentioning

confidence: 99%

Beat phenomena in metal nanowires, and their implications for resonance-based elastic property measurements

Zhan¹,

Gu²,

Park³

2012

Nanoscale

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Abstract. The elastic properties of 1D nanostructures such as nanowires are often measured experimentally through actuation of the nanowire at its resonance frequency, and then relating the resonance frequency to the elastic stiffness using elementary beam theory. In the present work, we utilize large scale molecular dynamics simulations to report a novel beat phenomenon in [110] oriented Ag nanowires. The beat phenomenon is found to arise from the asymmetry of the lattice spacing in the orthogonal elementary directions of the [110] nanowire, i.e. the [110] and [001] directions, which results in two different principal moments of inertia. Because of this, actuations imposed along any other direction are found to decompose into two orthogonal vibrational components based on the actuation angle relative to these two elementary directions, with this phenomenon being generalizable to <110> FCC nanowires of different materials (Cu, Au, Ni, Pd and Pt). The beat phenomenon is explained using a discrete moment of inertia model based on the hard sphere assumption, the model is utilized to show that surface effects enhance the beat phenomenon, while the effect is reduced with increasing nanowires cross-sectional size or aspect ratio. Most importantly, due to the existence of the beat phenomena, we demonstrate that in resonance experiments only a single frequency component is expected to be observed, particularly when the damping ratio is relatively large or very small. Furthermore, for a large range of actuation angles, the lower frequency is more likely to be detected than the higher one, which implies that experimental predictions of Young's modulus obtained from resonance may in fact be under predictions. The present study therefore has significant implications for experimental interpretations of Young's modulus as obtained via resonance testing.

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“…Nano electro mechanical systems (NEMS) are considered as promising switching devices for a variety of electronic applications due to the zero leakage current and abrupt switching properties [1][2][3][4][5][6].…”

Section: Introductionmentioning

confidence: 99%

Pull-In Voltage Modeling of Graphene Formed Nickel Nano Electro Mechanical Systems (NEMS)

Lim¹,

Lee²,

Choi³

et al. 2015

JSTS:Journal of Semiconductor Technology and Science

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Abstract-Pull-in voltage model of nano-electromechanical system with graphene is investigated for the device optimization. In the pull in voltage model, thickness of graphene layer is assumed to be uniform in vertical and lateral direction. Finite element analysis simulation has verified the feasibility of the suggested model. From the suggested model, pull-in voltage change with graphene thickness and cantilever length can be estimated. Maximum induced stress and graphene thickness have a reciprocal relationship.

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Suspended Single‐Crystal Diamond Nanowires for High‐Performance Nanoelectromechanical Switches

Cited by 110 publications

References 29 publications

3D microfabrication of single-wall carbon nanotube/polymer composites by two-photon polymerization lithography

3D microfabrication of single-wall carbon nanotube/polymer composites by two-photon polymerization lithography

Beat phenomena in metal nanowires, and their implications for resonance-based elastic property measurements

Pull-In Voltage Modeling of Graphene Formed Nickel Nano Electro Mechanical Systems (NEMS)

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